SEMI E94 -1000
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SEMI E94-1000 © SEMI 20001
SEMI E94-1000
PROVISIONAL SPECIFICATION FOR CONTROL JOB MANAGEMENT
This provisional specification was technically approved by the Global Information and Control Committee
and is the direct responsibility of the North American Information and Control Committee. Current edition
approved by the North American Regional Standards Committee on July 14 and August 28, 2000. Initially
available at www.semi.org September 2000, to be published October 2000. Originally published February
2000.
1 Purpose
1.1 This specification describes eq uipment provided
services to the factory that supports a high level of
factory automation. These services provide capabilities
for the host to coordinate processing and disposition of
materials on production equipment.
2 Scope
2.1 This specification may be applied to equipment
that is compliant to SEMI E30 (GEM). However, it is
also intended that this standard will be useful for future
generation equipment interfaces that supercede SEMI
E30, such as SEMI E53.
2.2 This standard does not purport to address safety
issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
3 Limitations
3.1 This standard presents a mode l of the ControlJob.
The model delineates the services (messages) and
behavior of the ControlJob. The model is protocol
independent. Thus, an ancillary standard must be
selected in order to provide a complete implementation.
3.2 This standard should not be applied to non-
production equipment, such as, material transport
systems or facilities (environmental) controllers.
3.3 Provisional Status
3.3.1 For this standard specification to be complete
(removal of provisional status) the following areas need
to be completed:
1) ControlJob to assure equivalent processing
regardless of module used in multi-module
equipment.
2) Complete specification of relationship to Carrier
Management.
3) Standardized support for the parallel execution of
ControlJobs.
4) Support for processing materials on equipment that
have batch sizes that are not either multi-carrier or
on which the carrier substrate location count is not
an integer multiple of the batch size.
5) Possible linkages between ControlJob, material,
and substrate tracking.
6) Complete work on the model for the control job
queue. Additional functions and attributes for
manipulating the job queue may be added.
7) A section on conformance.
3.3.2 The task force plans to finish t hese areas in
1999.
3.4 This specification applies to equ ipment for which
the atomic unit of material is the same for all input and
output carriers on the equipment. It may not apply to
equipment which would perform operations such as
slicing or assembly that would require or result in
different input and output material objects.
4 Referenced Standards
4.1 SEMI Standards
SEMI E30 — Generic Model for Communications and
Control of SEMI Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts,
Behavior, and Services
SEMI E40 — Standard for Processing Management
SEMI E53 — Event Reporting
NOTE 1: As listed or revised, all documents cited shall be the
latest publications of adopted standards.
5 Terminology
5.1 control job — defines a unit o f work on equipment
for one or more carriers. The work is described by a set
of one or more process jobs to be applied to the
material contained in the carriers.
5.2 de-queue — the act of removing an item from a
queue. The de-queue implies nothing about the status
of the item after removal.
5.3 equipment — the intelligent sy stem that
communicates with the host.
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