SEMI E99 -1000
需积分: 5 75 浏览量
2022-05-26
20:02:55
上传
评论
收藏 246KB PDF 举报
SEMI E99-1000
E
© SEMI 2000, 20011
SEMI E99-1000
E
THE CARRIER ID READER/WRITER FUNCTIONAL STANDARD:
SPECIFICATION OF CONCEPTS, BEHAVIOR, AND SERVICES
This specification was technically approved by the Global Physical Interfaces and Carriers Committee and is
the direct responsibility of the Japanese Physical Interfaces and Carriers Committee. Current edition
approved by the North American Regional Standards Committee on August 28, 2000. Initially available at
www.semi.org August 2000; to be published October 2000. Originally published February 2000; previously
published June 2000.
E
This document was modified in October 2000 to correct a typographical error. Changes were made to Table
7.
1 Purpose
1.1 The purpose of the Carrier ID Reader/Writer
Functional Standard effort is to provide a common
specification for concepts, behavior, and services
(functions) provided by a Carrier ID Reader and a
Carrier ID Reader/Writer to an upstream controller. A
standard interface will increase interchangeability of
Carrier ID Reader/Writers so that users and equipment
suppliers have a wider range of choices.
2 Scope
2.1 The Carrier ID Reader/Writer Interface Standard
addresses the functional requirements for a generic
Carrier ID Reader/Writer interface with an upstream
controller.
2.2 The specification includes requ ired behavior and
required communications for both a Carrier ID Reader
and a Carrier ID Reader/Writer.
2.3 This specification does not req uire, define, or
prohibit asynchronous messages sent by the Carrier ID
Reader or Reader/Writer.
2.4 This standard does not purport to address safety
issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
3 Limitations
3.1 This standard does not define t he specific protocol
to be used for the Carrier ID Reader/Writer.
Supplements to this standard are required to describe
how the functions of the Carrier ID Reader/Writer are
implemented for specific protocols.
4 Referenced Standards
4.1 SEMI Standards
SEMI E1.9 Provisional Mechanical Specification for
Cassettes Used to Transport and Store 300 mm Wafers
SEMI E15 Specification for Tool Load Port
SEMI E30 Generic Model for Communications and
Control of Manufacturing Equipment (GEM)
SEMI E39 Object Services Standard: Concepts,
Behavior, and Services
SEMI E44 Guide for Procurement and Acceptance
of Minienvironments
SEMI E47.1 Provisional Mechanical Specification
for Boxes and Pods Used to Transport and Store 300
mm Wafers
SEMI E62 Provisional Specification for 300 mm
Front-Opening Interface Mechanical Standard (FIMS)
SEMI E87 — Provisional Specification for Carrier
Management (CMS)
NOTE 1: As listed or revised, all documents cited shall be the
latest publications of adopted standards.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 CIDRW — represents both the Carrier ID Reader
and the Carrier ID Reader/Writer
5.1.2 FOUP — Front Opening Unif ied Pod
5.2 Definitions
5.2.1 attribute — information about or associated with
some entity or object.
5.2.2 carrier — 1. a container, such as a FOUP or
open cassette, with one or more positions for holding
substrates (SEMI E87). 2. any cassette, box, pod, or
boat that contains wafers.
5.2.3 carrier ID — an identifier for a carrier. A value
that uniquely identifies a given carrier in a factory. The
identifier may be represented physically with any one
of various technologies. For electronic tags with read/
write capability, in some cases the user may designate a
portion of the data to be used as a carrier ID.
5.2.4 carrier ID reader — a unit (su bsystem) that
detects and decodes data from the ID tag.
剩余17页未读，继续阅读
评论0
最新资源