没有合适的资源?快使用搜索试试~ 我知道了~
SEMI E30-1000 GENERIC MODEL FOR COMMUNICATIONS AND CONTROL.docx
需积分: 10 2 下载量 181 浏览量
2021-01-25
15:19:06
上传
评论
收藏 1.46MB DOCX 举报
温馨提示
试读
64页
SEMI E30-1000 GENERIC MODEL FOR COMMUNICATIONS AND CONTROL.docx
资源详情
资源评论
资源推荐
SEMI E30-1000
GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF
MANUFACTURING EQUIPMENT (GEM)
This standard was technically approved by the Global Information & Control Committee and is the direct
responsibility of the North American Information & Control Committee. Current edition approved by the
North American Regional Standards Committee on July 14 and August 28, 2000. Initially available at
www.semi.org August 2000; to be published October 2000. Originally published in 1992; previously
published June 2000.
CONTENTS
1 Introduction
1.1 Revision History
1.2 Scope
1.3 Intent
Figure 1.1, GEM Scope
1.4 Overview
Figure 1.2, GEM Components
1.5 Applicable Documents
2 Definitions
3 State Models
3.1 State Model Methodology
3.2 Communications State Model
Figure 3.0, Example Equipment Component
Overview
Figure 3.2.1, Communications State Diagram
Table 3.2, Communications State Transition Table
3.3 Control State Model
Figure 3.3, Control State Model
Table 3.3, CONTROL State Transition Table
3.4 Equipment Processing States
Figure 3.4, Processing State Diagram
Table 3.4, Processing State Transition Table
4 Equipment Capabilities and Scenarios
4.1 Establish Communications
4.2 Data Collection
Figure 4.2.1, Limit Combination Illustration: Control
Application
Figure 4.2.2, Elements of One Limit
Figure 4.2.3, Limit State Model
Table 4.2, Limit State Transition Table
4.3 Alarm Management
Figure 4.3, State Diagram for Alarm ALIDn
Table 4.3.1, Alarm State Transition Table
Table 4.3.2
4.4 Remote Control
4.5 Equipment Constants
4.6 Process Program Management
4.7 Material Movement
4.8 Equipment Terminal Services
4.9 Error Messages
4.10 Clock
4.11 Spooling
Figure 4.11, Spooling State Diagram
Table 4.11, Spooling State Transition
4.12 Control
5 Data Items
5.1 Data Item Restrictions
5.2 Variable Item List
6 Collection Events
Table 6.1, GEM Defined Collection Events
7 SECS-II Message Subset
STREAM 1: Equipment Status
STREAM 2: Equipment Control and
Diagnostics
STREAM 5: Exception (Alarm) Reporting
STREAM 6: Data Collection
STREAM 7: Process Program Load
STREAM 9: System Errors
STREAM 10: Terminal Services
STREAM 14: Object Services
1 SEMI E30-1000 © SEMI 1992, 2000
STREAM 15: Recipe
Management 8 GEM Compliance
8.1 Fundamental GEM Requirements
Figure 8.1, GEM Requirements and Capabilities
Table 8.1, Fundamental GEM Requirements
8.2 GEM Capabilities
Table 8.2, Section References for GEM Capabilities
8.3 Definition of GEM Compliance
8.4 Documentation
Figure 8.2, Host View of GEM
Table 8.3, GEM Compliance Statement
Table 8.4, SML Notation
A. Application Notes
A.1 Factory Operational Script
A.1.1 Anytime Capabilities
A.1.2 System Initialization and
Synchronization
A.1.3 Production Set-Up
A.1.4 Processing
A.1.5 Post-Processing
A.2 Equipment Front Panel
A.2.1 Displays and Indicators
A.2.2 Switches/Buttons
A.3 Examples of Equipment Alarms
Table A.3, Alarm Examples Per Equipment
Configuration
A.4 Trace Data Collection Example
A.5 Harel Notation
Figure A.5.1, Harel Statechart Symbols
Figure A.5.2, Example of OR Substates
Figure A.5.3, Example of AND Substates
A.5.1 State Definitions
A.5.2 Transition Table
Table A.5, Transition Table for Motor Example
A.6 Example Control Model Application
A.7 Examples of Limits Monitoring
A.7.1 Introduction
A.7.2 Examples
Figure A.7.1, Valve Monitoring Example
Figure A.7.2, Environment Monitoring Example
Figure A.7.3, Calibration Counter Example
A.8 Recipe Parameter Modification for
Process andEquipment Control
A.8.1 Introduction
A.8.2 Equipment Constants
A.8.3 Example
Figure A.8.1, CMP Single Wafer “Polishing”
System with Host Recipe Parameter
Modification Capability
Index
SEMI E30-1000 © SEMI 1992, 2000 2
SEMI E30-1000
GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF
MANUFACTURING EQUIPMENT (GEM)
This standard was technically approved by the Global Information & Control Committee and is the direct
responsibility of the North American Information & Control Committee. Current edition approved by the
North American Regional Standards Committee on July 14 and August 28, 2000. Initially available at
www.semi.org August 2000; to be published October 2000. Originally published in 1992; previously
published June 2000.
1 Introduction
1.1 Revision History — This is the first
release of the GEM standard.
1.2 Scope — The scope of the GEM
standard is limited to defining the behavior
of semiconductor equipment as viewed
through a communications link. The SEMI
E5 (SECS-II) standard provides the
definition of messages and related data
items exchanged between host and
equipment. The GEM standard defines
which SECS-II messages should be used, in
what situations, and what the resulting
activity should be. Figure 1.1 illustrates the
relationship of GEM, SECS-II and other
communications alternatives.
The GEM standard does NOT attempt to define the
behavior of the host computer in the communications
link. The host computer may initiate any GEM
message scenario at any time and the equipment shall
respond as described in the GEM standard. When a
GEM message scenario is initiated by either the host
or equipment, the equipment shall behave in the
manner described in the GEM standard when the
host uses the appropriate GEM messages.
GEM Scope
The capabilities described in this standard are
specifically designed to be independent of lower-
level communications protocols and connection
schemes (e.g., SECS-I, SMS, point-to-point,
connection-oriented or connectionless). Use of
those types of standards is not required or
precluded by this standard.
This standard does not purport to address safety
issues, if any, associated with its use. It is the
responsibility of the users of this standard to
establish appropriate safety and health practices
and determine the applicability of regulatory
limitations prior to use.
1.3 Intent — GEM defines a standard
implementation of SECS-II for all semiconductor
manufacturing equipment. The GEM standard
defines a common set of equipment behavior and
communications capabilities that provide the
functionality and flexibility to support the
manufacturing automation programs of
semiconductor device manufacturers. Equipment
suppliers may provide additional SECS-II
functionality not included in GEM as long as the
additional functionality does not conflict with
any of the behavior or capabilities defined in
GEM. Such additions may include SECS-II
messages, collection events, alarms, remote
command codes, processing states, variable data
items (data values, status values or equipment
constants), or other functionality that is unique to
a class (etchers, steppers, etc.) or specific
instance of equipment.
GEM is intended to produce economic benefits
for both device manufacturers and equipment
suppliers. Equipment suppliers benefit from the
ability to develop and market a single SECS-II
interface that satisfies most customers. Device
manufacturers benefit from the increased
functionality and standardization of the SECS-II
interface across all manufacturing equipment.
This standardization reduces the cost of software
development for both equipment suppliers and
device manufacturers. By reducing costs and
increasing functionality, device manufacturers
can automate semiconductor factories more
quickly and effectively. The flexibility provided
by the GEM standard also enables device
manufacturers to implement unique automation
solutions within a common industry framework.
3 SEMI E30-1000 © SEMI 1992, 2000
Figure 1.1
The GEM standard is intended to specify the
following:
— A model of the behavior to be exhibited by
semiconductor manufacturing equipment in a
SECS-II communication environment,
— A description of information and control functions
needed in a semiconductor manufacturing
environment,
— A definition of the basic SECS-II communications
capabilities of semiconductor manufacturing
equipment,
— A single consistent means of accomplishing an
action when SECS-II provides multiple possible
methods, and
— Standard message dialogues necessary to achieve
useful communications capabilities.
The GEM standard contains two types of
requirements:
— fundamental GEM requirements and —
requirements of additional GEM capabilities.
The fundamental GEM requirements form the
foundation of the GEM standard. The additional
GEM capabilities provide functionality required for
some types of factory automation or functionality
applicable to specific types of equipment. A detailed
list of the fundamental GEM requirements and
additional GEM capabilities can be found in Chapter
8, GEM Compliance. Figure 1.2 illustrates the
components of the GEM standard.
GEM Components
Equipment suppliers should work with their
customers to determine which additional GEM
capabilities should be implemented for a specific
type of equipment. Because the capabilities
defined in the GEM standard were specifically
developed to meet the factory automation
requirements of semiconductor manufacturers, it
is anticipated that most device manufacturers will
require most of the GEM capabilities that apply
to a particular type of equipment. Some device
manufacturers may not require all the GEM
capabilities due to differences in their factory
automation strategies.
1.4 Overview — The GEM standard is divided
into sections as described below. Section 1 —
Introduction
This section provides the revision history, scope
and intent of the GEM standard. It also provides
an overview of the structure of the document and
a list of related documents.
Section 2 — Definitions
This section provides definitions of terms used
throughout the document.
Section 3 — State Models
This section describes the conventions used
throughout this document to depict state models.
It also describes the basic state models that apply
to all semiconductor manufacturing equipment
and that pertain to more than a single capability.
State models describe the behavior of the
equipment from a host perspective.
Section 4 — Capabilities and Scenarios This
section provides a detailed description of the
communications capabilities defined for
semiconductor manufacturing equipment. The
description of each capability includes the
purpose, definitions, requirements, and
scenarios that shall be supported.
Section 5 — Data Definitions
This section provides a reference to the Data Item
Dictionary and Variable Item Dictionary found in
SEMI Standard E5. The first subsection shows
those data items from SECS-II which have been
restricted in their use (i.e., allowed formats). The
second subsection lists variable data items that
are available to the host for data collection and
shows any restrictions on their SECS-II
definitions.
SEMI E30-1000 © SEMI 1992, 2000 4
Figure 1.2
Section 6 — Collection Events
This section provides a list of required collection
events and their associated data.
Section 7 — SECS Message Subset
This section provides a composite list of the SECS-II
messages required to implement all capabilities
defined in the GEM standard.
Section 8 — GEM Compliance
This section describes the fundamental GEM
requirements and additional GEM capabilities and
provides references to other sections of the standard
where detailed requirements are located. This section
also defines standard terminology and documentation
that can be used by equipment suppliers and device
manufacturers to describe compliance with this
standard.
Section A — Application Notes
These sections provide additional explanatory
information and examples.
Section A.1 — Factory Operational Script This
section provides an overview of how the required
SECS capabilities may be used in the context of a
typical factory operation sequence. This section is
organized according to the sequence in which actions
are typically performed.
Section A.2 — Equipment Front Panel This section
provides guidance in implementing the required front
panel buttons, indicators, and switches as defined in
this document. A summary of the front panel
requirements is provided. Section A.3 — Examples
of Equipment Alarms This section provides examples
of alarms related to various equipment
configurations.
Section A.4 — Trace Data Collection Example This
section provides an example of trace initialization by
the host and the periodic trace data messages that
might be sent by the equipment.
Section A.5 — Harel Notation
This section explains David Harel’s “Statechart”
notation that is used throughout this document to
depict state models.
Section A.6 — Example Control Model Application
This section provides one example of a host’s
interaction with an equipment’s control model.
Section A.7 — Examples of Limits Monitoring
This section contains four limits monitoring
examples to help clarify the use of limits and to
illustrate typical applications.
1.5 Applicable Documents
1.5.1 SEMI Standards — The following SEMI
standards are related to the GEM standard. The
specific portions of these standards referenced by
GEM constitute provisions of the GEM standard.
SEMI E4 — SEMI Equipment Communications
Standard 1 — Message Transfer (SECS-I)
SEMI E5 — SEMI Equipment Communications
Standard 2 — Message Content (SECS-II)
SEMI E13 — Standard for SEMI
Equipment
Communication Standard Message Service
(SMS)
SEMI E23 — Specification for Cassette Transfer
Parallel I/O Interface
1.5.2 Other References
Harel, D., “Statecharts: A Visual Formalism for
Complex Systems,” Science of Computer
Programming 8 (1987) 231-274
1
.
NOTE 1: As listed or revised, all documents cited shall
be the latest publications of adopted standards.
2 Definitions
2.1 alarm — An alarm is related to
any abnormal situation on the
equipment that may endanger people,
equipment, or material being processed.
Such abnormal situations are defined by
the equipment manufacturer based on
physical safety limitations. Equipment
activities potentially impacted by the
presence of an alarm shall be inhibited.
2.1.1 Note that exceeding control limits
associated with process tolerance does not
constitute an alarm nor do normal equipment
events such as the start or completion of
processing.
2.2 capabilities — Capabilities are
operations performed by semiconductor
manufacturing equipment. These
operations are initiated through the
communications interface using
sequences of SECS-II messages (or
1 Elsevier Science, P.O. Box 945, New York, NY 10159-
0945, http://www.elvesier.nl/homepage/browse.htt
5 SEMI E30-1000 © SEMI 1992, 2000
剩余63页未读,继续阅读
wangwnkai
- 粉丝: 3
- 资源: 8
上传资源 快速赚钱
- 我的内容管理 展开
- 我的资源 快来上传第一个资源
- 我的收益 登录查看自己的收益
- 我的积分 登录查看自己的积分
- 我的C币 登录后查看C币余额
- 我的收藏
- 我的下载
- 下载帮助
安全验证
文档复制为VIP权益,开通VIP直接复制
信息提交成功
评论0