SEMI E30.pdf
需积分: 50 83 浏览量
2021-01-02
11:56:47
上传
评论
收藏 11.62MB PDF 举报
SEMI E30-1103 © SEMI 1992, 2003 1
SEMI E30-1103
GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF
MANUFACTURING EQUIPMENT (GEM)
This standard was technically approved by the Global Information & Control Committee and is the direct
responsibility of the Japanese Information & Control Committee. Current edition approved by the Japanese
Regional Standards Committee on August 8, 2003. Initially available at www.semi.org October 2003; to be
published November 2003. Originally published in 1992; previously published July 2003.
CONTENTS
1 Introduction
1.1 Revision History
1.2 Scope
1.3 Intent
Figure 1.1, GEM Scope
1.4 Overview
Figure 1.2, GEM Components
1.5 Applicable Documents
2 Definitions
3 State Models
3.1 State Model Methodology
3.2 Communications State Model
Figure 3.0, Example Equipment Component Overview
Figure 3.2.1, Communications State Diagram
Table 3.2, Communications State Transition Table
3.3 Control State Model
Figure 3.3, Control State Model
Table 3.3, CONTROL State Transition Table
3.4 Equipment Processing States
Figure 3.4, Processing State Diagram
Table 3.4, Processing State Transition Table
4 Equipment Capabilities and Scenarios
4.1 Establish Communications
4.2 Data Collection
Figure 4.2.1, Limit Combination Illustration: Control
Application
Figure 4.2.2, Elements of One Limit
Figure 4.2.3, Limit State Model
Table 4.2, Limit State Transition Table
4.3 Alarm Management
Figure 4.3, State Diagram for Alarm ALIDn
Table 4.3.1, Alarm State Transition Table
Table 4.3.2
4.4 Remote Control
4.5 Equipment Constants
4.6 Process Program Management
4.7 Material Movement
4.8 Equipment Terminal Services
4.9 Error Messages
4.10 Clock
4.11 Spooling
Figure 4.11, Spooling State Diagram
Table 4.11, Spooling State Transition
4.12 Control
5 Data Items
5.1 Data Item Restrictions
5.2 Variable Item List
6 Collection Events
Table 6.1, GEM Defined Collection Events
7 SECS-II Message Subset
STREAM 1: Equipment Status
STREAM 2: Equipment Control and Diagnostics
STREAM 5: Exception (Alarm) Reporting
STREAM 6: Data Collection
STREAM 7: Process Program Load
STREAM 9: System Errors
STREAM 10: Terminal Services
STREAM 14: Object Services
STREAM 15: Recipe Management
剩余178页未读，继续阅读
资源评论
