SEMIE84-0301SPECIFICATIONFORENHANCEDCARRIERHANDOFF.pdf_E5半导体设备通信标准消息数据格式资源-CSDN文库

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SEMI E84-0301 © SEMI 1999, 20011

SEMI E84-0301

SPECIFICATION FOR ENHANCED CARRIER HANDOFF PARALLEL I/O

INTERFACE

This specification was technically approved by the Global Physical Interfaces & Carriers Committee and is

the direct responsibility of the North American Physical Interfaces & Carriers Committee. Current edition

approved by the North American Regional Standards Committee on November 22, 2000. Initially available

at www.semi.org December 2000; to be published March 2001. Originally published June 1999; previously

published October 2000.

1 Purpose

1.1 Due to the migration to large wafer sizes, future

semiconductor factories will use extensive automated

material handling systems (AMHS) to transfer wafer

carriers, including FOUPs and open cassettes, of

increasing weight. The parallel input/output (PI/O)

control signals between the production equipment and

the AMHS must be better defined for more reliable and

efficient carrier handoffs (load/unload) at production

equipment load ports.

1.2 The purpose of this specification is to enhance the

capabilities of the parallel I/O interface defined in

SEMI E23 in order to support improvements in the

reliability and efficiency of carrier transfer. The

enhanced capabilities include continuous handoff,

simultaneous handoff, and the capabilities of error

detection on the interface.

NOTE 1: The specifications in this document shall be

considered independent from the specifications in SEMI E23;

therefore, use of this specification does not require SEMI

E23.

2 Scope

2.1 The scope of this specification is limited to

communications associated with the material handoff

operations between the active equipment (for example,

AMHS equipment including AGV, RGV and OHT) and

the passive equipment (for example, production

equipment including process and metrology equipment;

stockers, etc). This scope also extends to interbay

AMHS active equipment (i.e., OHS and stockers

equipped with transfer devices) and passive equipment

(i.e., OHS and stockers not equipped with transfer

devices). This specification defines the enhanced

parallel I/O interface signals used to handoff carriers

between the production equipment and the AMHS.

Figures 1 and 2 show examples of types of AMHS

equipment.

2.2 This enhanced carrier handoff parallel I/O

interface specification includes:

• Signal definition including load port assignment

signals (see Section 6.1),

• Carrier handoff sequence definitions and time

diagrams (see Section 6.2),

• Error indication, detection, and recovery (see

Sections 6.3 and 6.4),

• Connector type, signal, and pin assignment (see

Section 6.4), and

• Interface sensor unit size to be located at load port

defined by SEMI E15.1 (applicable for systems

designed to handle 300 mm wafer carriers).

2.3 The enhanced carrier handoff parallel I/O interface

controls the handoff of a carrier to and from the passive

equipment by the active equipment. This parallel I/O

interface only controls the automated handoff operation

of the carrier. The handoff is the operation in which a

carrier is transferred from one piece of equipment to

another. Both the active and passive equipment manage

this operation. The factory level controller (i.e., host)

does not manage the handoff operation. Figure 3 shows

applications for the parallel I/O interface specified in

this document.

2.4 This standard does not purport to address safety

issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

3 Limitations

3.1 Data for the material that is tra nsferred (handed

off) is managed through the equipment’s factory

interface. Material management by the factory level

controller is outside the scope of this document.

3.2 This specification defines the signals used to select

a load port. The physical correspondence of the parallel

I/O interface to the load port is not defined in this

document.

3.3 Error recovery procedures may need operator

assistance and/or proprietary procedures specific to the

equipment. Therefore, error recovery procedures are not

defined in this document.

3.4 Signal time diagrams apply to only one parallel

I/O interface.

SEMI E84-0301 © SEMI 1999, 20013

3.5 The installation positions of the parallel I/O

interface and the connector on the active and passive

equipment are not defined.

3.6 The swap handoff will be considered beyond the

scope of the standard for interbay AMHS equipment

(i.e., OHS, stockers). During a swap handoff, loading

and unloading occur simultaneously on the same

loadport.

4 Referenced Standards

4.1 SEMI Standards

SEMI E1.9 — Provisional Mechanical Specification for

Cassettes Used to Transport and Store 300 Wafers

SEMI E15.1 — Provisional Specification for 300 mm

Tool Load Port

SEMI E23 — Specification for Cassette Transfer

Parallel I/O Interface

SEMI E30 — Generic Model for Communications and

Control of SEMI Equipment (GEM)

SEMI E47.1 — Provisional Mechanical Specification

for Boxes and Pods Used to Transport and Store 300

mm Wafers

SEMI E87 — Provisional Specification for Carrier

Management (CMS)

4.2 ISO Standard

ISO 4902 — Information technology — Data

communication — 37-pole DTE/DCE interface

connector and contact number assignments

NOTE 2: As listed or revised, all documents cited shall be the

latest publications of adopted standards.

5 Terminology

5.1 access mode — a mode in whi ch passive

equipment knows which AMHS equipment (i.e. RGV,

AGV, and OHT/OHV) or operator is permitted to make

a material handoff.

5.2 active equipment — equipmen t that loads a

cassette onto the cassette stage of another piece of

equipment or unloads a cassette from the cassette stage

of another piece of equipment [SEMI E23].

5.3 automated material handling system (AMHS)

equipment — a piece of equipment which has a carrier

transfer robot that transfers carriers from and to passive

equipment. It includes rail guided vehicles (RGV),

automated guided vehicles (AGV), overhead hoist

transports (OHT), and stockers.

1 ISO Central Secretariat, 1, rue de Varembé, Case postale 56, CH-

1211 Genève 20, Switzerland

5.4 automatic access mode — a mode in which

AMHS equipment performs a material handoff rather

than an operator.

5.5 carrier — any cassette, box, p od, or FOUP that

contains wafers [SEMI E1.9]. Also known as wafer

carrier.

5.6 cassette — an open structure that holds one or

more substrates [SEMI E1.9]. Also known as open

cassette (OC).

5.7 continuous handoff — successive handoffs of two

carriers. Continuous handoff is in series, meaning one

carrier transfer occurs and is then immediately followed

by another. The continuous handoff may involve: load

and load, unload and unload, or unload and load

operations.

5.8 front opening unified pod (FO UP) — a box (that

complies with SEMI E47.1) with a non-removable

cassette (so that its interior complies with SEMI E1.9)

and with a front-opening interface (FIMS) [SEMI

E47.1].

5.9 handoff — is the operation in w hich a carrier is

transferred (loaded or unloaded) from one piece of

equipment to another.

5.10 handoff conflict area — an area where the active

equipment resource could interfere with the passive

equipment resource during the handoff operation.

5.11 handoff interlock abnormal — the state, which

indicates the passive equipment, has detected abnormal

conditions in the handoff operation. It may indicate the

possibility that the interference of the active equipment

resource with the passive equipment resource has

occurred in the handoff conflict area.

5.12 handoff unavailable — the state, which indicates

the passive equipment, is not available for material

handoff operation.

5.13 load port — the interface loca tion on a tool

where wafer carriers are placed to allow the tool to

process wafers [SEMI E15].

5.14 manual access mode — an access mode in which

an operator performs a material handoff of a carrier

rather than the AMHS equipment.

5.15 passive equipment — equipme nt that is loaded or

unloaded by active equipment [SEMI E23]. Passive

equipment includes process equipment, metrology

equipment, stockers, etc.

5.16 simultaneous handoff — concu rrent handoff

operations of two carriers. Simultaneous handoff is in

parallel, meaning two carriers are transferred at the

same time.

SEMI E84-0301 © SEMI 1999, 2001 4

5.17 single arm/double hand AMHS equipment —

AMHS equipment which hands off two carriers using a

single arm mechanism with two hands (dual end

effectors).

5.18 single arm/single hand AMHS equipment —

AMHS equipment which hands off a carrier using a

single arm mechanism with a single hand (single end

effector).

5.19 single handoff — the transfer o f a single carrier

in a handoff operation.

6 Enhanced Carrier Handof f Parallel I/O

Interface Requirements

6.1 Signal Definitions

6.1.1 Table 1 shows the signals requ ired for the

enhanced carrier handoff parallel I/O interface. The

table defines signal name, the direction of the

information (P/A: P represents passive equipment and

A represents active equipment), and the description. In

the description, the meaning of the signal and the

indication of the signal level, and comments. Signals

defined in Table 1 are:

VALID Indicates that the signal transition is

active and selected.

CS_0 Carrier Stage 0

CS_1 Carrier Stage 1

TR_REQ Transfer Request

L_REQ Load Request

U_REQ Unload Request

READY READY for Transfer

BUSY BUSY for Transfer

COMPT Complete Transfer

CONT Continuous Handoff

HO_AVBL Handoff Available

ES Emergency Stop

VA Vehicle arrived ∗

AM_AVBL Transfer Arm Available ∗

VS_0 Carrier Stage 0 from Passive OHS

Vehicle ∗

VS_1 Carrier Stage 1 from Passive OHS

Vehicle ∗

∗ The VA, AM_AVBL, VS_0,1 signals are intended

only for use with interbay AMHS equipment (passive

OHS vehicles).

The VALID, CS_0, CS_1 signals are not intended for

use with interbay AMHS equipment (passive OHS

vehicles).

6.1.2 Load Port Assignment Signals

6.1.2.1 The signals CS_0 and CS_1 are used to select

load ports to be used for the handoff. For the parallel

I/O interface which is dedicated to a single load port,

the signals must be set:

CS_0 ON

CS_1 OFF

See Figures 4 and 5.

6.1.2.2 The capability to control two l oad ports by a

common parallel I/O interface is required; therefore, it

is assumed in this specification that a common parallel

I/O interface can be used to control handoffs of two

load ports.

6.1.2.3 The assignment of the load port is relevant

when two load ports use a common parallel I/O

interface. The active equipment shall select the load

port by means of the CS_0 and/or CS_1 signals (see

Figure 6).

CS_0 selects the left hand load port as viewed when

facing towards the equipment’s load ports.

CS_1 selects the right hand load port as viewed when

facing towards the equipment’s load ports.

6.1.2.4 For the simultaneous handoff, both of CS_0

and CS_1 must be set to ON at the handoff. Figure 8

shows a piece of passive equipment with four load ports

(LP1, LP2, LP3, LP4) and two parallel I/O interfaces

(PI/O#1, PI/O#2), where PI/O#1 is common to load

ports LP1 and LP2 and PI/O#2 is common to load ports

LP3 and LP4. Tables 2 and 3 show the range of signal

combinations.

6.1.3 Load Port Assignment Signals for OHS (Passive

type)

6.1.3.1 The signals VS_0 and VS_1 ar e used to select

load ports to be used for the handoff. For the parallel

I/O interface which is dedicated to a single load port,

the signals must be set;

VS_0 ON

VS_1 OFF

6.1.3.2 Two load ports can be controlled by using

VS_0 and VS_1.

VS_0 ON: Selects left hand Load port.

OFF: Does not select Left hand Load port.

VS_1 ON: Selects Right hand Load port.

OFF: Does not select Right hand Load port.

VS_0 and VS_1 are controlled individually.

Table 1 Signals for the Enhanced Carrier Handoff Parallel I/O Interface

Signal Name P/A Description

VALID A -> P Indicates that the interface communication is valid.

ON: the communication is valid

OFF: the communication is not valid

Before this signal is turned ON, the load port must be specified by the signal CS_0 and/or CS_1.

CS_0 A -> P Specifies the load port used for carrier handoff (see Section 6.1.2, Load Port Assignment Signals).

One PI/O device per load port

ON: Use the load port for carrier handoff

OFF: N/A

One PI/O device per 2 load ports

ON: Use the left load port for handoff

OFF: Do not use the left load port of handoff

CS_1 A -> P Specifies the load port used for carrier handoff (see Section 6.1.2, Load Port Assignment Signals).

One PI/O device per load port

Not used (OFF)

One PI/O device per 2 load ports

ON: Use the right load port for handoff

OFF: Do not use the right load port of handoff

TR_REQ A -> P Requests the handoff to the passive equipment.

ON: the active equipment has requested the handoff

OFF: the active equipment has not requested the handoff

This signal is turned OFF when the BUSY signal transitions to OFF.

L_REQ P -> A Indicates the load port is assigned to load a carrier. L_REQ always indicates a carrier transfer from

Active to Passive equipment.

ON: The load port is assigned to load a carrier

OFF: The load port is not assigned to load a carrier

This signal is turned ON when the load port is specified by CS_0 and/or CS_1 and the VALID signal

is turned ON. This signal is turned OFF when the load port detects the carrier in the correct position.

In simultaneous handoff, the carrier on both load ports shall not be present when this signal is turned

ON, and the carriers shall be present in correct position on both load ports when this signal is turned

OFF.

U_REQ P -> A Indicates the load port is assigned to unload a carrier. U_REQ always indicates a carrier transfer

from Passive to Active equipment.

ON: The load port is assigned to unload a carrier

OFF: The load port is not assigned to unload a carrier

This signal is turned ON when the load port is specified by CS_0 and/or CS_1, and the VALID

signal is turned ON. This signal is turned OFF when the carrier on the load port is removed.

In simultaneous handoff, the carrier on both load ports shall be present in correct position when this

signal is turned ON, and the carriers shall not be present on both load ports when this signal is turned

OFF.

READY P -> A Indicates the passive equipment has accepted the transfer request from the active equipment.

ON: the passive equipment is ready for the handoff

OFF: the passive equipment is not ready for the handoff

This signal is turned ON when the passive equipment accepts the transfer request, and it is turned

OFF when the COMPT signal is turned ON.

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