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SEMI E5是半导体制造设备通信标准的组成部分，全称为SEMI Equipment Communications Standard 2 Message Content，通常缩写为SECS-II。SECS-II是半导体制造设备间数据交换的标准化协议，它涉及设备与主计算机系统（Host）之间的通讯协议以及数据定义。知识点详细说明如下： 1. **目的**（Purpose）: SECS-II定义了设备与主机之间的通信语言和数据格式，以支持半导体生产过程的自动化和数据采集。 2. **范围**（Scope）: SECS-II标准适用于半导体生产线上的设备通信，涵盖了各种信息的交换，如设备状态、控制命令、工艺数据等。 3. **局限性**（Limitations）: 该标准可能存在某些实施方式，尤其是与Stream4相关的实施方式，可能涉及到美国专利4,884,674和5,216,613所涵盖的发明，以及其他由德州仪器公司持有或待定的专利。SEMII在发布此标准时不涉及这些或其他专利权利的适用性或有效性。 4. **引用标准和文件**（Referenced Standards and Documents）: SECS-II参考了一系列行业标准和文档，这些是制定该标准的基础。 5. **术语**（Terminology）: SECS-II定义了一套术语，以便于制造商、软件开发者和终端用户理解标准内容。 6. **消息传输协议**（The Message Transfer Protocol）: - **意图**（Intent）: SECS-II的传输协议旨在确保数据能够在设备和主机间安全可靠地传输。 - **消息格式**（Message）: 标准定义了消息的基本格式，包括数据包结构和大小。 - **阻塞要求**（Blocking Requirements）: 规定了消息传输中的阻塞机制，用以避免通信拥堵。 - **消息头**（Message Header）: 消息头包含用于识别消息类型、源和目标的信息。 - **事务超时**（Transaction Timeout）: 规定了通信事务在多长时间无响应后应超时。 - **多事务开启**（Multiple Open Transactions）: 允许在一个通信会话中同时进行多个事务。 7. **流和功能**（Streams and Functions）: - **流**（Streams）: 流是通信的通道，定义了数据传输的优先级和用途。 - **功能**（Functions）: 功能定义了在特定流上执行的通信活动类型。 - **流和功能分配**（Stream and Function Allocation）: 描述了如何为特定通信目的分配和使用流和功能。 8. **事务和对话协议**（Transaction and Conversation Protocols）: - **意图**（Intent）: 设立了规范的事务和对话流程，保证通信双方能够有序地交换数据。 - **事务定义**（Transaction Definition）: 明确了事务的基本单元和组成。 - **事务级别要求**（Transaction Level Requirements）: 规定了满足事务完整性的必要条件。 - **对话协议**（Conversation Protocols）: 描述了不同事务间的对话流程。 9. **数据结构**（Data Structures）: - **意图**（Intent）: 定义了数据如何在消息中被组织和传输。 - **条目**（Item）: 数据的基本单元。 - **列表**（List）: 一系列条目的集合。 - **局部化字符字符串**（Localized Character String Items）: 指定字符数据的格式和编码。 - **示例数据结构**（Example Data Structures）: 提供了一些数据结构的样例。 - **数据项字典**（Data Item Dictionary）: 是一个标准化的数据元素集合，用于实现一致的数据交换。 - **变量项字典**（Variable Item Dictionary）: 包含了可变的数据元素。 - **对象字典**（Object Dictionary）: 定义了通信中用到的对象和它们的属性。 10. **消息细节**（Message Details）: - **意图**（Intent）: 提供了对SECS-II消息格式的深入解析。 - **消息使用**（Message Usage）: 描述了如何使用各种SECS-II消息。 - **特定流和功能的使用**（如Stream0, Stream1, ... Stream8）: 为每种流和功能提供了详细说明，包括它们各自的定义和用途。文档的最后部分可能还提到了半导体设备制造商和半导体工厂中实现SECS-II的实际案例，以及如何在不同的制造环境和设备类型中应用这些通信标准。 SEMI E5标准为半导体设备间的通信提供了一套完整的技术规范，使设备能够实现无缝的数据交换和更高级别的自动化，是智能制造和设备联网基础资料中不可或缺的一部分。

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1 SEMI E5-0709 © SEMI 1982, 2009

SEMI E5-0709

SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE

CONTENT (SECS-II)

This standard was technically approved by the global Information & Control Committee. This edition was

approved for publication by the global Audits and Reviews Subcommittee on May 13, 2009. It was available

at www.semi.org in June 2009 and on CD-ROM in July 2009. Originally published 1982; previously

published November 2008.

NOTICE: The user’s attention is called to the possibility that some implementations of this standard, particularly

those related to the use of Stream 4, may involve the use of inventions covered by U.S. patents 4,884,674 and

5,216,613, and by other patents issued or pending, held by Texas Instruments Incorporated. By publication of this

standard, SEMI takes no position respecting either the applicability or the validity of these or other patent rights

asserted in connection with any item mentioned in this standard. Users of this standard are expressly advised that

determination of any such patent rights and the risk of infringement of such rights, are entirely their own

responsibility.

Table of Contents

1 Purpose .......................................................................................................................................................................3

2 Scope ..........................................................................................................................................................................3

3 Limitations..................................................................................................................................................................3

4 Referenced Standards and Documents .......................................................................................................................3

5 Terminology ...............................................................................................................................................................4

6 The Message Transfer Protocol..................................................................................................................................5

6.1 Intent....................................................................................................................................................................5

6.2 Message...............................................................................................................................................................5

6.3 Blocking Requirements........................................................................................................................................5

6.4 Message Header ..................................................................................................................................................5

6.5 Transaction Timeout............................................................................................................................................5

6.6 Multiple Open Transactions ................................................................................................................................6

7 Streams and Functions................................................................................................................................................6

7.1 Streams................................................................................................................................................................6

7.2 Functions.............................................................................................................................................................6

7.3 Stream and Function Allocation..........................................................................................................................6

8 Transaction and Conversation Protocols ....................................................................................................................7

8.1 Intent....................................................................................................................................................................7

8.2 Transaction Definition.........................................................................................................................................7

8.3 Transaction Level Requirements .........................................................................................................................7

8.4 Conversation Protocols.......................................................................................................................................7

9 Data Structures ...........................................................................................................................................................8

9.1 Intent....................................................................................................................................................................8

9.2 Item......................................................................................................................................................................8

9.3 List.......................................................................................................................................................................9

9.4 Localized Character String Items........................................................................................................................9

9.5 Example Data Structures...................................................................................................................................10

9.6 Data Item Dictionary.........................................................................................................................................11

9.7 Variable Item Dictionary...................................................................................................................................53

9.8 Object Dictionary ..............................................................................................................................................62

10 Message Detail .......................................................................................................................................................72

10.1 Intent................................................................................................................................................................72

10.3 Message Usage. ...............................................................................................................................................73

10.4 Stream 0 and Function 0..................................................................................................................................73

10.5 Stream 1 Equipment Status..............................................................................................................................73

10.6 Stream 2 Equipment Control and Diagnostics ................................................................................................80

SEMI E5-0709 © SEMI 1982, 2009 2

10.7 Stream 3 Materials Status................................................................................................................................99

10.8 Stream 4 Material Control.............................................................................................................................113

10.9 Stream 5 Exception Handling........................................................................................................................127

10.10 Stream 6 Data Collection ............................................................................................................................132

10.11 Stream 7 Process Program Management. ...................................................................................................142

10.12 Stream 8 Control Program Transfer ...........................................................................................................159

10.13 Stream 9 System Errors ...............................................................................................................................160

10.14 Stream 10 Terminal Services.......................................................................................................................163

10.15 Stream 11 Host File Services (Deleted).......................................................................................................165

10.16 Stream 12 Wafer Mapping...........................................................................................................................166

10.17 Stream 13 Data Set Transfers......................................................................................................................178

10.18 Stream 14 Object Services...........................................................................................................................190

10.19 Stream 15 Recipe Management ...................................................................................................................210

10.20 Steam 16 Processing Management..............................................................................................................238

10.21 Stream 17 Equipment Control and Diagnostics. .........................................................................................254

10.22 Stream 18 Subsystem Control and Data......................................................................................................260

10.23 Stream 19 Recipe and Parameter Management ..........................................................................................265

11 Message Documentation.......................................................................................................................................275

11.1 Intent..............................................................................................................................................................275

11.2 Standard Form SECS-II Document ...............................................................................................................275

12 Units of Measure ..................................................................................................................................................276

12.1 Intent..............................................................................................................................................................276

12.2 Units Symbols................................................................................................................................................276

12.3 Compliance....................................................................................................................................................277

12.4 SECS-II Units of Measure Identifiers. ...........................................................................................................278

RELATED INFORMATION 1 .................................................................................................................................284

R1-1 The General Node Transaction Protocol.......................................................................................................284

R1-2 Some Suggested Message Usage..................................................................................................................284

R1-3 Notes on SECS-II Data Transfers.................................................................................................................284

R1-4 Process Programs..........................................................................................................................................287

R1-5 Suggested Baseline SECS Equipment Implementation ................................................................................291

3 SEMI E5-0709 © SEMI 1982, 2009

1 Purpose

1.1 The SEMI Equipment Communications Standard Part 2 (SECS-II) defines the details of the interpretation of

messages exchanged between intelligent equipment and a host. This specification has been developed in cooperation

with the Japan Electronic Industry Development Association Committee 12 on Equipment Communications.

1.1.1 It is the intent of this standard to be fully compatible with SEMI E4 — Equipment Communications Standard

(SECS-I). It is also the intent to allow for compatibility with alternative message transfer protocols. The details of

the message transfer protocol requirements are contained in § 6.

1.1.2 It is the intent of this standard to define messages to such a level of detail that some consistent host software

may be constructed with only minimal knowledge of individual equipment. The equipment, in turn, may be

constructed with only minimal knowledge of the host.

1.1.3 The messages defined in the standard support the most typical activities required for IC manufacturing. The

standard also provides for the definition of equipment-specific messages to support those activities not covered by

the standard messages. While certain activities can be handled by common software in the host, it is expected that

equipment-specific host software may be required to support the full capabilities of the equipment.

2 Scope

2.1 SECS-II gives form and meaning to messages exchanged between equipment and host using a message transfer

protocol, such as SECS-I.

2.1.1 SECS-II defines the method of conveying information between equipment and host in the form of messages.

These messages are organized into categories of activities, called streams, which contain specific messages, called

functions. A request for information and the corresponding data transmission is an example of such an activity.

2.1.2 SECS-II defines the structure of messages into entities called items and lists of items. This structure allows for

a self-describing data format to guarantee proper interpretation of the message.

2.1.3 The interchange of messages is governed by a set of rules for handling messages called the transaction

protocol. The transaction protocol places some minimum requirements on any SECS-II implementation.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish appropriate safety and health practices and determine the

applicability of regulatory or other limitations prior to use.

3 Limitations

3.1 SECS-II applies to equipment and hosts used in the manufacturing of semiconductor devices. Examples of the

activities supported by the standard are: transfer of control programs, material movement information, measurement

data, summarized test data, and alarms.

3.1.1 The minimum compliance to this standard involves meeting the few constraints outlined in § 8. It is expected

that a given piece of equipment will require only a subset of the functions described in this standard. The number of

functions and the selection of functions will depend upon the equipment capabilities and requirements. For each

piece of equipment, the exact format for each function provided must be documented according to the form outlined

in § 10.

3.1.2 It is assumed that the equipment will define the messages used in a particular implementation of SECS-II. It is

assumed the host will support equipment implementation.

4 Referenced Standards and Documents

4.1 SEMI Standards

SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)

SEMI E6 — Guide for Semiconductor Equipment Installation Documentation

SEMI E148 — Specification for Time Sychronization and Definition of the TS-Clock Object

SEMI E5-0709 © SEMI 1982, 2009 4

4.2 ANSI Standard

ANSI X3.4-1977 — Code for Information Interchange (ASCII)

4.3 IEEE Standard

IEEE 754 — Standard for Binary Floating Point Arithmetic

4.4 The Japan Electronic Industry Development Association (JEIDA) has requested that the SECS-II standard

incorporate support for the JIS-8 codes for data exchange. This code would allow support for katakana characters in

Japanese implementations of SECS-II.

JIS-6226 — JIS 8-bit Coded Character Set for Information Interchange, Japanese Industrial Standards.

NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

5 Terminology

5.1 Definitions

5.1.1 The following brief definitions refer to sections providing further information.

5.1.2 block — a physical division of a message used by the message transfer protocol (see § 6.3).

5.1.3 conversation — a sequence of related messages (see § 8.4).

5.1.4 conversation timeout — an indication that a conversation has not completed properly (see § 8.4.1).

5.1.5 device ID — a number between 0 and 32767 used in identifying the particular piece of equipment

communicating with a host (see § 6.4.1).

5.1.6 equipment — the intelligent system which communicates with a host.

5.1.7 function — a specific message for a specific activity within a stream (see § 7.2).

5.1.8 host — the intelligent system which communicates with the equipment.

5.1.9 interpreter — the system that interprets a primary message and generates a reply when requested (see § 6.2).

5.1.10 item — a data element within a message (see § 9.2).

5.1.11 item format — a code used to identify the data type of an item (see § 9.2).

5.1.12 list — a group of items (see § 9.3).

5.1.13 message — a complete unit of communication (see § 6.2).

5.1.14 message header — information about the message passed by the message transfer protocol (see § 6.4).

5.1.15 multi-block message — a message sent in more than one block by the message transfer protocol (see § 6.3.2).

5.1.16 originator — the creator of a primary message (see § 6.2).

5.1.17 packet — a physical division of a message used by the message transfer protocol (see § 6.3).

5.1.18 primary message — an odd numbered message. Also, the first message of a transaction (see § 6.2 and § 7.2).

5.1.19 reply — the particular secondary message corresponding to a primary message (see § 6.2 and § 7.2).

5.1.20 secondary message — an even-numbered message. Also the second message of a transaction (see § 6.2 and

§ 7.2).

1 American National Standards Institute, Headquarters: 1819 L Street, NW, Washington, DC 20036, USA. Telephone: 202.293.8020; Fax:

202.293.9287, New York Office: 11 West 42nd Street, New York, NY 10036, USA. Telephone: 212.642.4900; Fax: 212.398.0023;

http://www.ansi.org

2 Institute of Electrical and Electronics Engineers, IEEE Operations Center, 445 Hoes Lane, P.O. Box 1331, Piscataway, New Jersey 08855-

1331, USA. Telephone: 732.981.0060; Fax: 732.981.1721; http://www.ieee.org

3 Japanese Industrial Standards. Available through the Japanese Standards Association, 1-24, Akasaka 4-Chome, Minato-ku, Tokyo 107-8440,

Japan. Telephone: 81.3.3583.8005; Fax: 81.3.3586.2014; http://www.jsa.or.jp

5.1.21 single-block message — a message sent in one block by the message transfer protocol (see § 6.3.1).

5.1.22 stream — a category of messages (see § 7.1).

5.1.23 transaction — a primary message and its associated secondary message, if any (see § 8.2).

5.1.24 transaction timeout — an indication from the message transfer protocol that a transaction has not completed

properly (see § 6.5).

6 The Message Transfer Protocol

6.1 Intent — SECS-II is fully compatible with the message transfer protocol defined by SECS-I. It is the intent of

this standard to allow for compatibility with alternative message transfer protocols. The purpose of this section is to

define the requirements of the interaction between an application using SECS-II and the message transfer protocol.

The methods used to implement these requirements are not covered as a part of this standard. The terms used in this

standard are those used by SECS-I. Equivalent terms may be different for other message transfer protocols.

6.2 Messages — The message transfer protocol is used to send messages between equipment and host. The message

transfer protocol must be capable of sending a primary message, indicating whether a reply is requested; and, if a

reply is requested, it must be capable of associating the corresponding secondary message or reply message with the

original primary message. The term originator will refer to the creator of the original primary message. The term

interpreter will refer to the entity that interprets the primary message at its destination and generates a reply when

requested.

6.3 Blocking Requirements — The message transfer protocol must support the following SECS-II message blocking

requirements.

6.3.1 Single-Block Messages — SECS-II requires that certain messages be sent in a single block or single packet by

the message transfer protocol. Those messages defined in this standard as single-block SECS-II messages must be

sent in a single-block or packet. The method used by the application software to tell the message transfer protocol

that a particular message must be sent as a single block is not covered as part of this standard. For compatibility with

SECS-I, the maximum length allowed for a single-block SECS-II message is 244 bytes. The minimum requirement

for the message transfer protocol is to be able to send single-block SECS-II messages.

6.3.2 Multi-Block Messages — For compatibility with SECS-I, SECS-II messages that are longer than 244 bytes are

referred to as multi-block messages. Also, certain SECS-II messages are allowed to be multi-block messages even if

they otherwise meet the single-block length requirements. Certain older implementations may impose application-

specific requirements on block sizes for certain incoming messages. Beginning with the 1988 revision of the

standard, new applications may not impose application-specific requirements on incoming block sizes. Applications

implemented before 1988 may impose such requirements.

6.4 Message Header — The message transfer protocol must provide the following information, called the message

header, with every message. Only the content of the message header is defined by this standard. The exact format of

the message header passed between the application and the message transfer protocol is not covered as part of this

standard.

NOTE 1: In SECS-I, this information is contained in the 10 byte header of each block of a message.

6.4.1 Device ID — The message transfer protocol must be capable of identifying the device ID (0–32767) which

indicates the source or destination of a message.

6.4.2 Stream and Function — The message transfer protocol must be capable of identifying to SECS-II a

minimum15 bit message identification code. In SECS-II, messages are identified by a stream code (0–127, 7 bits)

and a function code (0–255, 8 bits). Each combination of stream and function represents a distinct message

identification.

6.4.3 Reply Requested — The message transfer protocol must be capable of identifying whether a reply is requested

to a primary message.

6.5 Transaction Timeout — It is presumed that the message transfer protocol will notify SECS-II in the event of

failure to receive an expected reply message within a specified transaction timeout period.

NOTE 2: In SECS-I, a transaction timeout occurs if either the reply timeout (T3) is exceeded before the first block of a reply

message is received or if the interblock timeout (T4) is exceeded before an expected block of a multi-block message is received.

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df595420469

2023-07-29

这个文件的内容清晰明了，很容易跟随和理解。

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