目录
目 录
1. 用途............................................................................................................................................1
2. 整机系统描述............................................................................................................................1
2.1 URE-2000/35型紫外光刻机的主要特点是：................................................................1
2.2 URE-2000/35型紫外光刻机的系统：............................................................................2
3. 性能指标和设备参数................................................................................................................3
4. 整机各分系统结构及使用.........................................................................................................3
4.1 曝光光学系统..................................................................................................................3
4.1.1 工作原理...............................................................................................................3
4.1.2多点光源实现均匀照明的原理.............................................................................4
4.1.3 滤光原理...............................................................................................................4
4.1.4 冷却措施...............................................................................................................4
4.2 工件台..............................................................................................................................6
4.2.1 工件台主要功能有：............................................................................................6
4.2.2 工件台结构...........................................................................................................6
4.2.3 上升机构...............................................................................................................6
4.2.4 整体运动台...........................................................................................................6
4.2.5 相对运动台...........................................................................................................7
4.2.6 调平.......................................................................................................................7
4.2.7 转动台...................................................................................................................7
4.2.8 掩模台和承片台....................................................................................................7
4.3 对准显微镜（详细请看显微镜说明书）.......................................................................9
4.4 电控系统........................................................................................................................10
4.4.1 主控单片机系统..................................................................................................10
4.4.2 汞灯电源..............................................................................................................11
4.4.3 面板开关使用说明..............................................................................................12
4.5气动系统.........................................................................................................................13
5. 操作..........................................................................................................................................14
5.1 开机准备........................................................................................................................14
5.2 开机................................................................................................................................15
5.3 上片................................................................................................................................15
5.4 调平................................................................................................................................15
5.5 曝光时间设定................................................................................................................15
5.6 显微镜对准调节............................................................................................................16
5.7 关机................................................................................................................................16
6. 常见故障及损耗件更换..........................................................................................................16
6.1常见故障及解决方案......................................................................................................16
6.1.1 压力表和真空表显示不正确..............................................................................16
6.1.2 曝光光学系统外罩（图1）温度过高................................................................17
6.1.3 汞灯触发困难......................................................................................................17
6.1.4 汞灯亮度不足......................................................................................................18
6.1.5 控制系统不能正常工作......................................................................................18
6.1.6快门不能正常工作...............................................................................................19
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