A guided-mode resonance (GMR) filter with the same material (Ta2O5) for both the grating layer and the waveguide layer is designed and fabricated. This simple structure is easy to fabricate and can avoid the defects at the grating/waveguide interface using different materials. The spectral response measured with a Lambda 900 spectrophotometer under normal incidence for TE waves exhibits a peak reflectance exceeding 80% at the wavelength of 1040 nm with a full-width half-maximum (FWHM) linewidth
