Serial mode combined polishing of high-quality flat mirror

In order to obtain high-quality flat mirror, a serial mode combined polishing technology, consisting of continuous polishing (CP) and ion beam figuring (IBF), is presented. The function of CP technology is to get certain figure accuracy and meet the requirements of the surface roughness of the flat mirror. The final high figure accuracy of the flat mirror is achieved by the IBF technology. We introduce the polishing principles of CP and IBF and then, the polishing experiment and material removal