书书书
收稿日期：2014 －1 1 －06
基金项目：国家自然科学基金（项目编号：50704001 ）
作者简介：徐前刚（1972 －），男，湖北荆州人，教授，主要研究方向：材料表面与界面，E-mail：xuqiangang＠163 .com。
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材料工程
文章编号：2095 －1248（2015 ）01 －0050 －05
磁控溅射沉积 ZnNi 合金薄膜及真空脱锌
徐前刚，李明佳
（沈阳航空航天大学 材料科学与工程学院，沈阳 1 10136 ）
摘要：采用射频磁控溅射沉积方法制备了不同成分的 ZnNi 合金薄膜，并研究了真空热处理
对其成分及表面形貌的影响。研究结果表明，在单靶溅射沉积 ZnNi 合金薄膜中，通过调节靶
材锌镍面积比可以获得不同成分且分布均匀的 ZnNi 薄膜。经过 600 ℃、60 min、真空度为
4 ×10
－3
Pa，真空热处理之后的薄膜中的锌完全蒸发，剩下的镍薄膜呈多孔结构，微孔尺寸在
100 nm 至 500 nm 之间。随着薄膜锌含量的增加，真空热处理后薄膜表面孔隙率增大。随着
真空热处理温度的升高，微孔尺寸增大。结合溅射沉积理论及元素蒸发理论对 ZnNi 薄膜沉
积及真空脱 Zn 进行了分析。
关键词：脱锌；ZnNi 合金薄膜；真空热处理；多孔结构
中图分类号：TB31 ；V261 .2 文献标志码：A
doi：10.3969 ／j.issn.2095 －1248.2015 .01 .009
Magnetron sputtering deposition and vacuum dezincification
of zinc-nickel alloy thin films
XU Qian-gang，LI Ming-jia
（College of Materials Science and Engineering，Shenyang Aerospace University，Shenyang 1 10136，China）
Abstract：The zinc-nickel alloy thin films with different zinc contents were prepared by means of radio
frequency magnetron sputtering deposition.The effect of vacuum heat treatment on the content and sur-
face morphology of alloy films has been studied.The results showed that it was feasible to deposit ZnNi
thin films with different Zn contents by changing the area ratio of zinc and nickel in the mosaic target.
The zinc contained in the alloy films has evaporated completely after vacuum heat treatment （4 ×10
－3
Pa，60 min）at 600 ℃.After dezincification，micro-pores with the size of 100nm to 500nm were formed
in the thin films.The porosity increased with the zinc contents of thin film after vacuum heat treatment.
With the increase in the temperature of vacuum heat treatment，the size of micro-pores in the film in-
creased.The deposition and dezincification in vacuum of ZnNi thin film were analyzed combined with
the theory of elements evaporation and sputtering deposition.
Key words：dezincification；zinc-nickel alloy thin films；vacuum heat treatment；porous structure
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