Corrosion behaviors of the copper alloy electrodes in ArF excime...

The corrosion behaviors of the ArF excimer laser copper alloy electrodes were studied. The morphology, composition and impurities were characterized by optical microscope, scanning electron microscopy, electron microprobe and glow discharge mass spectrometer methods. The anode produces the reef, the corrosion pits, the hole layer and the $1｛-｝10~\unicode[STIX]｛x03BC｝\text｛m｝$ level flake impurity. The cathode produces the particles, the sputtering pits, the element reduce layer and the $1~\unico