a MEMS-IDT gyroscope
Thedesign,developmentandperformanceevaluationofanovelradiofrequency microelectromechanicalsystems(MEMS)gyroscope,basedonasurfaceacousticwave resonator(SAWR)andasurfaceacousticwavesensorispresentedinthispaper.Mostofthe MEMSgyroscopesbasedonsiliconvibratorystructuresthatutilizetheenergytransfer betweenthetwovibratorymodesdemandsmallfabricationtolerancestominimizesignal outputwhenthereisnorotation(i.e.zerorateoutput).This1cm × 1cmgyroscopeoperates basedontheprincipleofasurfaceacousticwave(SAW)onapiezoelectricsubstrate.The SAWRcreatesSAWstandingwaveswithinthecavityspacebetweentheinterdigital transducers(IDTs).Theparticlesattheanti-nodesofastandingwaveexperiencelarge amplitudesofvibrationperpendiculartotheplaneofthesubstrate,whichservesasthe referencevibratingmotionforthisgyroscope.
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