毕业设计&课设-用于Raith电子束光刻（EBL）和聚焦离子束（FIB）系统的MATLAB工具——推出MATLAB p.zip

Raith_GDSII MATLAB toolbox ========================== *Version 1.2* The four class definitions in this toolbox provide a simple, versatile, and scriptable means of generating patterns for [Raith](https://www.raith.com) electron-beam lithography (EBL) and focused ion beam (FIB) tools using [MATLAB](https://www.mathworks.com/products/matlab/). The Raith_GDSII MATLAB Toolbox is currently maintained by the [University of Alberta nanoFAB Centre](https://nanofab.ualberta.ca). Versions 1.1 and earlier were developed at the (former) National Institute for Nanotechnology, a joint initiative between the University of Alberta, the Government of Canada, the Government of Alberta, and the National Research Council Canada. Features -------- * Generate Raith-dialect GDSII hierarchy (.csf) and positionlist (.pls) files directly within MATLAB * Plot patterns in MATLAB using Raith dose factor colouration, from individual GDSII elements to entire positionlists * Full support for Raith curved elements (circles, ellipses, arcs) * Full support for Raith "fixed beam moving stage" exposure elements (paths and circles) **(new in v. 1.2)** * Simply-connected font defined to use for text elements * Export pattern in plain GDSII (Raith-specific elements converted to polygons and paths), to use with non-Raith GDSII editors Requirements and installation ----------------------------- This toolbox has been tested with MATLAB R2010a and later; use with earlier versions of MATLAB is at your own risk. To install, simply place the four class definitions found in the `src` directory (`Raith_element.m`, `Raith_structure.m`, `Raith_library.m`, and `Raith_positionlist.m`) into a folder on your MATLAB path. Documentation ------------- Please refer to the [online documentation](https://raith-gdsii.readthedocs.io/en/latest/) for a quick-start guide, tutorial examples, and a full description of the class definitions. License ------- This toolbox is subject to the terms of the [Mozilla Public License, v. 2.0](http://mozilla.org/MPL/2.0/).