Portable quantitative phase microscope for material metrology an...

Quantitative phase microscopy (QPM) has emerged as an important tool for material metrology and biological imaging. For broader adoption in those applications, we have proposed and demonstrated a new portable off-axis QPM method, which works in both transmission and reflection modes to meet different sample measurement requirements. The temporal and spatial sensitivities of our system, as quantified by optical path-length difference values, are 0.65 nm and 1.04 nm, respectively. To demonstrate i