Scanning Dammann lithography (SDL) is proposed and implemented, which uses a Dammann grating to generate multiple beams with sharp step boundary for writing large-sized gratings efficiently. One of the most attractive advantages is that this technique can accelerate the writing speed, e.g. 1 \times 32 Dammann grating can be 32 times faster than the single laser scanning system. More importantly, the uniformity of the multi-beams-written lines is much better than the single laser beam scanning sy
