The design of a two-dimensional (2D) microscanner actuated electrostatically is presented, and a silicon-oninsulator (SOI) micromachining process is utilized to fabricate the sample. The microscanner can oscillate at inherent frequencies of 1146 and 360 Hz around two rotational axes, generating maximum twisting angles of ±10o and ±5.3o under two 10-V square waves, respectively. A monochromatic laser projection system based on Lissajous pattern is demonstrated using the developed microscanner, re
