Servo control of thrust position for 6DOF Magnetic suspension st...

A novel 6DOF magnetic suspension stage is studied in this paper, the magnetic suspension<br>stage system includes a suspension system and a thrust servo system, and this paper only studies the<br>thrust system. The thrust system is a nonlinear, multivariable, and strong coupling system. For<br>achieving its precise servo control, we used the auto-disturbance rejection controller to observe the<br>inner and outside disturbance, and to offset the system. The result of simulation and experi