摘要:讨论了 FPD 产业中玻璃基板搬运机器人的常用构型,确定了圆柱坐标型玻
璃基板搬运机器人的设
计方案.结合玻璃基板搬运机器人的设计过程和构型特点,着重介绍了玻璃基板搬
运机器人向伸缩
模块,0 向旋转模块和 Z 向升降模块的功能及实现各模块功能的机械结构和运动
机理,并以尺向伸缩模
块为例,从转矩匹配和转动惯量匹配两个方面校核了电机与负载的匹配性能.验证
结果表明,玻璃基板
搬运机器人所选电机与负载的匹配性能良好,且 R 向伸缩模块的转动惯量具有周
期性变化的规律.
关键词:玻璃基板搬运机器人;模块;转矩匹配;转动惯量匹配
中图分类号:TG659;TP24 文献标识码:A
TheDesignandVerificationofGlassSubstrateHandlingRobot
CONGMing,XUXiao—fei,YANGMing-sheng,MUCong?yi
(1.SchoolofMechanicalEngineering,DalianUniversityofTechnology,DalianLiaoning11
6024;2.Dongguan
AnwellElectronicsCo.Ltd.,DongwanDongguan523080,China)
Abstract:ThecommonConfigurationsofglasssubstraterobotforFPDarediscussed,thecyli
ndricalcoordi-
naterobotisdetermined.Basedonthedesignandresearchofglasssubstratehandlingrobot,th
efunctionand
mechanicalstructureofRexpansionmodule,0revolvingmoduleandZliftingmoduleareanal
yzed.Andtaking
theRexpansionmoduleasexample,themotormatchingsituationofglasssubstratehandlingr
obotischecked
fromthefollowingtwoaspects:torquematchingandmomentofinertiamatching.Testresults
showthatmotor
andloadmatchingperformanceareperfect,andthemomentofinertiaofRexpansionmodulei
sPeriodic.
Keywords:glasssubstratehandlingrobot;module;torquematching;momentofinertiamatc