GISeriesMFCs-MAN.pdf

GE50A弹性体密封的5-50,000 sccm质量流量控制器,The G-Series GE50A013103RMV020 digitally-controlled mass flow controller utilizes the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. It has a Full Scale Flow Range of 1000 sccm and a control range of 20 to 1000 sccm, a 15-pin D-subminature connector with tied grounds, and a 0-5 VDC flow input/output signal. G and I Series Digital Thermal Based MFC Technology Manual