This document is to provide SPICE circuit simulation parameters for the TSMC 65-nm CMOS
mixed-signal/RF low power salicide CU LOW-K SPICE models(1P9M 1.0V/2.5V) applications.
Cadence Spectre (version 6.0.2.247 or later version), Synopsys Hspice (version H2006.03 or
2007.03-SP1 later) and Mentor Graphic��s Eldo (v6.6_1.1 and later version) tools are used
to verify & QA the BSIM4 models. Accuracy & QA in other simulators are not guaranteed.
**********************************************
* TSMC SPICE MODEL *
**********************************************
PROCESS : 65nm Mixed Signal RF SALICIDE Low-K IMD (1.0/2.5/over-drive 3.3V) (CRN65GPLUS)
MODEL : BSIM4 ( V4.5 )
DOC. NO.: T-N65-CM-SP-018
VERSION : V1.0
DATE : Nov. 22, 2007
************************************************************************************************
This release note describes the features in model of CRN65G+ RF Spice model version 1.0
************************************************************************************************
Content
1. MOS MODEL
2. MIM CAPACITOR MODEL
3. SPIRAL INDUCTOR MODEL
4. MOS VARACTOR MODEL
5. JUNCTION VARACTOR MODEL
6. RF RESISTOR MODEL
7. RTMOM CAPACITOR MODEL
8. MIM CAPACITOR MODEL
9. RAW DATA
10. UPDATE HISTORY
=========================================================================================================================
(1) MOS MODEL
(a) 1.0V Standard Vt MOS MODEL
.lib RF_MOS
Model name NF L (um) Wf (um)
low high low high low high
-----------------------------------------------------------------
nmos_rf 1 32 0.06 0.24 0.6 6.0
-----------------------------------------------------------------
pmos_rf 1 32 0.06 0.24 0.6 6.0
-----------------------------------------------------------------
pmos_rf_nw 1 32 0.06 0.24 0.6 6.0
-----------------------------------------------------------------
**NF: Finger number
**Wf: Width per finger
(b) 1.8V MOS MODEL
.lib RF_MOS_18
Model name NF L (um) Wf (um)
low high low high low high
-------------------------------------------------------------------
nmos_rf_18 1 32 0.26 0.38 1. 10.00
-------------------------------------------------------------------
pmos_rf_18 1 32 0.26 0.38 1. 10.00
-------------------------------------------------------------------
pmos_rf_18_nw 1 32 0.26 0.38 1. 10.00
-------------------------------------------------------------------
**NF: Finger number
**Wf: Width per finger
(c) 2.5V MOS MODEL
.lib RF_MOS_25
Model name NF L (um) Wf (um)
low high low high low high
-------------------------------------------------------------------
nmos_rf_25 1 32 0.28 0.50 1. 10.00
-------------------------------------------------------------------
pmos_rf_25 1 32 0.28 0.50 1. 10.00
-------------------------------------------------------------------
pmos_rf_25_nw 1 32 0.28 0.50 1. 10.00
-------------------------------------------------------------------
**NF: Finger number
**Wf: Width per finger
(d) 3.3V MOS MODEL
.lib RF_MOS_33
Model name NF L (um) Wf (um)
low high low high low high
-------------------------------------------------------------------
nmos_rf_33 1 32 0.5 0.70 1. 10.00
-------------------------------------------------------------------
pmos_rf_33 1 32 0.4 0.70 1. 10.00
-------------------------------------------------------------------
pmos_rf_33_nw 1 32 0.4 0.70 1. 10.00
-------------------------------------------------------------------
**NF: Finger number
**Wf: Width per finger
=========================================================================================================================
(2) MIM CAPACITOR MODEL :
HF model:
1.0fF MiM_Cap w/i underground metal for 1PXM 4<=X<=9
1.5fF MiM_Cap w/i underground metal for 1PXM 4<=X<=9
2.0fF MiM_Cap w/i underground metal for 1PXM 4<=X<=9
## library files:
1. The MIM capacitors with underground metal are modeled with sub-circuit 'mimcap_um_sin_rf'
a. mimflag=1 for 1.0fF MIM capacitors ,and mismatchflag==0 for no mismatch mismatchflag=1 for mismatch
b. mimflag=2 for 1.5fF MIM capacitors ,and mismatchflag==0 for no mismatch mismatchflag=2 for mismatch
c. mimflag=3 for 2.0fF MIM capacitors ,and mismatchflag==0 for no mismatch mismatchflag=3 for mismatch
2. The MIM capacitors without underground metal are modeled with sub-circuit 'mimcap_woum_sin_rf'
a. mimflag=1 for 1.0fF MIM capacitors ,and mismatchflag==0 for no mismatch mismatchflag=1 for mismatch
b. mimflag=2 for 1.5fF MIM capacitors ,and mismatchflag==0 for no mismatch mismatchflag=2 for mismatch
c. mimflag=3 for 2.0fF MIM capacitors ,and mismatchflag==0 for no mismatch mismatchflag=3 for mismatch
3. The UTM direct contact MIM capacitors with underground metal are modeled with sub-circuit 'mimcap_um_sin_udc_rf'
a. mimflag=1 for 1.0fF MIM capacitors ,and mismatchflag==0 for no mismatch mismatchflag=1 for mismatch
b. mimflag=2 for 1.5fF MIM capacitors ,and mismatchflag==0 for no mismatch mismatchflag=2 for mismatch
c. mimflag=3 for 2.0fF MIM capacitors ,and mismatchflag==0 for no mismatch mismatchflag=3 for mismatch
4. The UTM direct contact MIM capacitors without underground metal are modeled with sub-circuit 'mimcap_woum_sin_udc_rf'
a. mimflag=1 for 1.0fF MIM capacitors ,and mismatchflag==0 for no mismatch mismatchflag=1 for mismatch
b. mimflag=2 for 1.5fF MIM capacitors ,and mismatchflag==0 for no mismatch mismatchflag=2 for mismatch
c. mimflag=3 for 2.0fF MIM capacitors ,and mismatchflag==0 for no mismatch mismatchflag=3 for mismatch
Model name lt(um) wt(um)
low high low high
-------------------------------------------------------------
mimcap_um_sin_rf 4 100 4 100
mimcap_woum_sin_rf 4 100 4 100
mimcap_um_sin_udc_rf 4 100 4 100
mimcap_woum_sin_udc_rf 4 100 4 100
------------------------------------------------------------
**lt: length dimension of top metal (CTM)
**wt: width dimension of top metal (CTM)
**lay: the number of metal layer under MIM, ex. for MIM is between M7 and M8, lay=7
**lt >= wt
**MIM is between Mz and Mx
=========================================================================================================================
(3) SPIRAL INDUCTOR MODEL :
HSPICE LEVEL 49:
## library files:
models are applied in:
spiral_std_mu_z, spiral_sym_mu_z, spiral_sym_ct_mu_z -- from 1P5M to 1P9M. UTM(34K) is used for the core inductor.
spiral_std_mza_a, spiral_sym_mza_a, spiral_sym_ct_mza_a, spiral_std_mu_a, spiral_sym_mu_a, spiral_
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