InstruTechCCM501Hornet用户手册资源-CSDN文库

版权申诉

94 浏览量 2024-05-04 10:27:54 上传评论收藏 1.7MB PDF 举报

资源推荐

资源详情

资源评论

p/n 001587-104

InstruTech®

Cold Cathode Ionization Vacuum Gauge

CCM501 Module

The Hornet™

User Manual

InstruTech

1475 S. Fordham St.

Longmont, CO 80503

USA

Phone: +1-303-651-0551

Fax: +1-303-678-1754

E-mail info@instrutechinc.com

www.instrutechinc.com

Instruction Manual CCM501 Hornet

InstruTech Page 1

Important User Information There are operational characteristic differences between solid state equipment and

electromechanical equipment. Because of these differences, and because there are a variety of uses for solid state equipment, all

persons that apply this equipment must take every precaution and satisfy themselves that the intended application of this equipment is

safe and used in an acceptable manner.

In no event will InstruTech be responsible or liable for indirect or consequential damages that result from the use or application of this

equipment.

Any examples or diagrams included in this manual are provided solely for illustrative purposes. Because of the many variables and

requirements imposed on any particular installation, InstruTech cannot assume responsibility or liability for any actual use based on the

examples and diagrams.

No patent liability is assumed by InstruTech with respect to use of information circuits, equipment, or software described in this manual.

Throughout this manual we use notes, notices and apply internationally recognized symbols and safety messages to make you aware of

safety considerations.

Identifies information about practices or circumstances that can cause electrical or physical hazards which, if precautions are not taken,

could result in death or serious injury, property damage, or economic loss.

Identifies information about practices or circumstances that can cause electrical or physical hazards which, if precautions are not taken,

could result in minor or moderate injury, property damage, or economic loss.

Identifies information that is critical for successful application and understanding of the product.

Labels may be located on or inside the device to alert people that dangerous voltages may be present.

CAUTION

CccWARNING

WARNING

NOTICE

SHOCK HAZARD

CccWARNING

WARNING

Instruction Manual CCM501 Hornet

InstruTech Page 1

Table of Contents

1 Introduction / General Information ......................................................................................................3

1.1 Description ....................................................................................................................................3

1.2 Specifications ................................................................................................................................3

1.3 Dimensions ....................................................................................................................................4

1.4 Part Numbers ................................................................................................................................4

1.5 Options & Accessories...................................................................................................................4

2 Important Safety Information ...............................................................................................................5

2.1 Safety Precautions - General .........................................................................................................5

2.2 Safety Precautions - Service and operation ..................................................................................6

2.3 Electrical Conditions ......................................................................................................................7

2.3.1 Proper Equipment Grounding ...............................................................................................7

2.3.2 Electrical Interface and Control .............................................................................................7

2.4 Overpressure and use with hazardous gases ...............................................................................7

2.5 Gases other than Nitrogen / air ....................................................................................................8

3 Installation ............................................................................................................................................9

3.1 Mechanical Installation .................................................................................................................9

3.2 Electrical Installation ...................................................................................................................10

3.2.1 Grounding ............................................................................................................................10

3.2.2 Connectors ...........................................................................................................................10

3.2.3 Connectors pin-out ..............................................................................................................11

4 Bakeout ...............................................................................................................................................12

5 Setup and Operation ...........................................................................................................................13

5.1 Applying power ...........................................................................................................................13

5.2 Overpressure shut down .............................................................................................................13

5.3 User Interface Basics ...................................................................................................................13

5.4 Factory-Set Default Parameters ..................................................................................................14

Instruction Manual CCM501 Hornet

InstruTech Page 2

5.5 Programming ...............................................................................................................................15

5.5.1 SETUP DISP ...........................................................................................................................15

5.5.2 SETUP UNIT ..........................................................................................................................16

5.5.3 SETUP IG...............................................................................................................................17

5.5.4 SETUP COMMS .....................................................................................................................19

5.5.5 SERVICE MENU .....................................................................................................................19

5.6 Activating the sensor ..................................................................................................................20

6 Using the gauge with different gases .................................................................................................21

7 Analog Output .....................................................................................................................................22

7.1 0 to 8 Vdc, 1 V/decade analog output ........................................................................................22

7.2 1.8 to 8.7 Vdc, 0.8 V/decade analog output ...............................................................................23

7.2.1 1.8 to 8.7 Vdc, 0.8 V/decade analog output - Torr ..............................................................23

7.2.2 1.8 to 8.7 Vdc, 0.8 V/decade analog output - mbar ............................................................24

7.2.3 1.8 to 8.7 Vdc, 0.8 V/decade analog output - pascals .........................................................25

8 RS485 serial communications .............................................................................................................26

8.1 Device Specific Serial Communication Info .................................................................................26

8.2 RS485 Command Protocol Summary ..........................................................................................27

9 Service .................................................................................................................................................28

9.1 Calibration ...................................................................................................................................28

9.2 Maintenance ...............................................................................................................................28

9.3 Troubleshooting - Error Messages ..............................................................................................28

9.4 Troubleshooting - Operation ......................................................................................................29

9.5 Contamination ............................................................................................................................30

9.6 Cold Cathode Sensor Replacement .............................................................................................31

9.7 Cold Cathode Sensor Cleaning ....................................................................................................32

10 Factory Service and Support ...............................................................................................................33

11 Warranty .............................................................................................................................................33