SAED_PDK90 - 90nm Process Design Kit
© 2009-2016 SYNOPSYS ARMENIA Educational Department Rev. 1.12 Page 1 of 52
PROCESS DESIGN KIT
SAED_PDK90
DATABOOK
Revision : 1.12
Technology : SAED90nm
Process : SAED90nm 1P9M 1.2v / 2.5v
SAED_PDK90 - 90nm Process Design Kit
© 2009-2016 SYNOPSYS ARMENIA Educational Department Rev. 1.12 Page 2 of 52
CONTENTS
1 Introduction ............................................................................................................................... 7
1.1 Goal of PDK development ............................................................................................... 7
1.2 Content of PDK ............................................................................................................... 7
1.3 Methodology of getting PDK components ....................................................................... 7
2 Design Environment ................................................................................................................. 9
2.1 Design environment setup general issues ....................................................................... 9
2.2 Design environment setup ............................................................................................... 9
3 SAED_PDK90 ........................................................................................................................ 10
3.1 Technology files ............................................................................................................ 10
3.1.1 Display resources ................................................................................................ 10
3.1.2 Technology file .................................................................................................... 10
3.1.3 Layer map file ...................................................................................................... 10
3.2 Physical verification files ................................................................................................ 10
3.2.1 Hercules .............................................................................................................. 10
3.3 Parasitic extract files ...................................................................................................... 11
3.3.1 STARRCXT ......................................................................................................... 11
4 Support devices ...................................................................................................................... 12
4.1 MOSFETs ...................................................................................................................... 12
4.2 Resistors ....................................................................................................................... 13
4.3 Capacitor ....................................................................................................................... 13
4.4 Diodes ........................................................................................................................... 14
4.5 BJTs .............................................................................................................................. 15
4.6 Inductors ........................................................................................................................ 15
4.7 Varactors ....................................................................................................................... 16
5 Device Datasheets ................................................................................................................. 17
5.1 NMOS Transistor ........................................................................................................... 17
5.1.1 nmos3t ................................................................................................................. 17
5.1.2 nmos4t ................................................................................................................. 18
5.1.3 nmos4t_25 ........................................................................................................... 19
5.1.4 nmos4t_hvt .......................................................................................................... 21
5.1.5 nmos4t_lvt ........................................................................................................... 22
5.2 PMOS Transistor ........................................................................................................... 23
5.2.1 pmos3t ................................................................................................................. 23
5.2.2 pmos4t ................................................................................................................. 25
5.2.3 pmos4t_25 ........................................................................................................... 26
5.2.4 pmos4t_hvt .......................................................................................................... 27
5.2.5 pmos4t_lvt ........................................................................................................... 29
5.3 Resistor ......................................................................................................................... 30
5.3.1 rnpoly ................................................................................................................... 30
5.3.2 rppoly ................................................................................................................... 32
5.3.3 rnpoly_wos .......................................................................................................... 33
5.3.4 rppoly_wos .......................................................................................................... 34
5.3.5 rndiff ..................................................................................................................... 36
5.3.6 rpdiff ..................................................................................................................... 37
5.4 Capacitor ....................................................................................................................... 38
5.4.1 ccap ..................................................................................................................... 38
SAED_PDK90 - 90nm Process Design Kit
© 2009-2016 SYNOPSYS ARMENIA Educational Department Rev. 1.12 Page 3 of 52
5.5 Diode ............................................................................................................................. 40
5.5.1 nd......................................................................................................................... 40
5.5.2 pd......................................................................................................................... 41
5.6 Inductor ......................................................................................................................... 43
5.6.1 spiind ................................................................................................................... 43
5.7 BJT ................................................................................................................................ 45
5.7.1 vnpn ..................................................................................................................... 45
5.7.2 vpnp ..................................................................................................................... 46
5.8 Varactor ......................................................................................................................... 48
5.8.1 nvar...................................................................................................................... 48
5.8.2 pvar...................................................................................................................... 49
6 References ............................................................................................................................. 52
SAED_PDK90 - 90nm Process Design Kit
© 2009-2016 SYNOPSYS ARMENIA Educational Department Rev. 1.12 Page 4 of 52
LIST OF TABLES
Table 1.1 Content of SAED_PDK90 ............................................................................................. 7
Table 2.1 Tool Startup Sequence ................................................................................................. 9
Table 4.1 MOS Spice models list ................................................................................................ 12
Table 4.2 MOS symbol parameters ............................................................................................ 12
Table 4.3 Resistor Spice models list ........................................................................................... 13
Table 4.4 Resistor symbol parameters ....................................................................................... 13
Table 4.5 Capacitor Spice models list ........................................................................................ 14
Table 4.6 Capacitor symbol parameters ..................................................................................... 14
Table 4.7 Diode Spice models list .............................................................................................. 14
Table 4.8 Diode symbol parameters ........................................................................................... 14
Table 4.9 BJT Spice models list ................................................................................................. 15
Table 4.10 BJT symbol parameters ............................................................................................ 15
Table 4.11 Inductor Spice models list ......................................................................................... 15
Table 4.12 Inductor symbol parameters ..................................................................................... 16
Table 4.13 Varactor Spice models list ........................................................................................ 16
Table 4.14 Varactor symbol parameters ..................................................................................... 16
Table 5.1 nmos3t Spice model ................................................................................................... 17
Table 5.2 nmos3t Device Layers ................................................................................................ 17
Table 5.3 nmos3t Device Derivation ........................................................................................... 18
Table 5.4 nmos3t LVS Checking ................................................................................................ 18
Table 5.5 nmos4t Spice model ................................................................................................... 18
Table 5.6 nmos4t Device Layers ................................................................................................ 19
Table 5.7 nmos4t Device Derivation ........................................................................................... 19
Table 5.8 nmos4t LVS Checking ................................................................................................ 19
Table 5.9 nmos4t_25 Spice model ............................................................................................. 19
Table 5.10 nmos4t_25 Device Layers ........................................................................................ 20
Table 5.11 nmos4t_25 Device Derivation ................................................................................... 20
Table 5.12 nmos4t_25 LVS Checking ........................................................................................ 20
Table 5.13 nmos4t_hvt Spice model .......................................................................................... 21
Table 5.14 nmos4t_hvt Device Layers ....................................................................................... 21
Table 5.15 nmos4t_hvt Device Derivation .................................................................................. 22
Table 5.16 nmos4t_hvt LVS Checking ....................................................................................... 22
Table 5.17 nmos4t_lvt Spice model ............................................................................................ 22
Table 5.18 nmos4t_lvt Device Layers ......................................................................................... 23
Table 5.19 nmos4t_lvt Device Derivation ................................................................................... 23
Table 5.20 nmos4t_lvt LVS Checking ......................................................................................... 23
Table 5.21 pmos3t Spice model ................................................................................................. 24
Table 5.22 pmos3t Device Layers .............................................................................................. 24
Table 5.23 pmos3t Device Derivation ......................................................................................... 24
Table 5.24 pmos3t LVS Checking .............................................................................................. 24
Table 5.25 pmos4t Spice model ................................................................................................. 25
Table 5.26 pmos4t Device Layers .............................................................................................. 25
Table 5.27 pmos4t Device Derivation ......................................................................................... 26
Table 5.28 pmos4t LVS Checking .............................................................................................. 26
Table 5.29 pmos4t_25 Spice model ........................................................................................... 26
Table 5.30 pmos4t_25 Device Layers ........................................................................................ 27
SAED_PDK90 - 90nm Process Design Kit
© 2009-2016 SYNOPSYS ARMENIA Educational Department Rev. 1.12 Page 5 of 52
Table 5.31 pmos4t_25 Device Derivation ................................................................................... 27
Table 5.32 pmos4t_25 LVS Checking ........................................................................................ 27
Table 5.33 pmos4t_hvt Spice model .......................................................................................... 28
Table 5.34 pmos4t_hvt Device Layers ....................................................................................... 28
Table 5.35 pmos4t_hvt Device Derivation .................................................................................. 28
Table 5.36 pmos4t_hvt LVS Checking ....................................................................................... 29
Table 5.37 pmos4t_lvt Spice model ............................................................................................ 29
Table 5.38 pmos4t_lvt Device Layers ......................................................................................... 30
Table 5.39 pmos4t_lvt Device Derivation ................................................................................... 30
Table 5.40 pmos4t_lvt LVS Checking ......................................................................................... 30
Table 5.41 rnpoly Spice model ................................................................................................... 31
Table 5.42 rnpoly Device Layers ................................................................................................ 31
Table 5.43 rnpoly Device Derivation ........................................................................................... 31
Table 5.44 rnpoly LVS Checking ................................................................................................ 31
Table 5.45 rppoly Spice model ................................................................................................... 32
Table 5.46 rppoly Device Layers ................................................................................................ 32
Table 5.47 rppoly Device Derivation ........................................................................................... 33
Table 5.48 rppoly LVS Checking ................................................................................................ 33
Table 5.49 rnpoly_wos Spice model ........................................................................................... 33
Table 5.50 rnpoly_wos Device Layers ........................................................................................ 34
Table 5.51 rnpoly_wos Device Derivation................................................................................... 34
Table 5.52 rnpoly_wos LVS Checking ........................................................................................ 34
Table 5.53 rppoly_wos Spice model ........................................................................................... 35
Table 5.54 rppoly_wos Device Layers ........................................................................................ 35
Table 5.55 rppoly_wos Device Derivation................................................................................... 35
Table 5.56 rppoly_wos LVS Checking ........................................................................................ 35
Table 5.57 rndiff Spice model ..................................................................................................... 36
Table 5.58 rndiff Device Layers .................................................................................................. 36
Table 5.59 rndiff Device Derivation ............................................................................................. 37
Table 5.60 rndiff LVS Checking .................................................................................................. 37
Table 5.61 rpdiff Spice model ..................................................................................................... 37
Table 5.62 rpdiff Device Layers .................................................................................................. 38
Table 5.63 rpdiff Device Derivation ............................................................................................. 38
Table 5.64 rpdiff LVS Checking .................................................................................................. 38
Table 5.65 ccap Spice model ..................................................................................................... 39
Table 5.66 ccap Device Layers .................................................................................................. 39
Table 5.67 ccap Device Derivation ............................................................................................. 40
Table 5.68 ccap LVS Checking .................................................................................................. 40
Table 5.69 nd Spice model ......................................................................................................... 40
Table 5.70 nd Device Layers ...................................................................................................... 41
Table 5.71 nd Device Derivation ................................................................................................. 41
Table 5.72 nd LVS Checking ...................................................................................................... 41
Table 5.73 pd Spice model ......................................................................................................... 41
Table 5.74 pd Device Layers ...................................................................................................... 42
Table 5.75 pd Device Derivation ................................................................................................. 42
Table 5.76 pd LVS Checking ...................................................................................................... 42
Table 5.77 spilnd Spice model .................................................................................................... 43
Table 5.78 spiind Device Layers ................................................................................................. 44
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