摘要
选用纳米球刻蚀技术在蓝宝石(Al
2
O
3
)基底上制备 350 nm 聚苯乙烯(PS)微球密排掩模版,然
后采用反应射频磁控溅射方法分别在 PS/Al
2
O
3
和 Al
2
O
3
基底上沉积氧化锌(ZnO)薄膜,去除
掩模版的 PS 微球后,对经退火处理的两种样品进行 X 射线衍射分析、扫描电子显微镜观察
和荧光光谱测试。结果表明,在 PS/Al
2
O
3
上生长的 ZnO 薄膜(样品 1)的晶粒呈明显的蠕虫
状,而直接在 Al
2
O
3
基底上生长的 ZnO 薄膜(样品 2)表面晶粒为不完全六棱台形状。样品 2
的结晶性能优于样品 1,但是在 362 nm 附近样品 1 的近带边缘荧光发射峰强度比样品 2 的
发射峰强 43 倍。
Abstract
350 nm polystyrene microspheres (PSs) are prepared on sapphire substrates as masks
by nanosphere lithography technique, and then ZnO thin films are grown on PS/Al
2
O
3
and
Al
2
O
3
substrates by reactive radio frequency magnetron sputtering method, respectively.
X-ray diffraction analysis, scanning electron microscope observation, and
photoluminescence (PL) test are used to measure two kinds of samples after annealing;
the PS mask is removed from the Al
2
O
3
substrate. The results show that the grains of the
ZnO thin film grown on the PS/Al
2
O
3
(sample 1) are obviously worm-like; the grains of the
ZnO thin film directly grown on the Al
2
O
3
substrate (sample 2) show incomplete
hexagonal prism shape. Although the crystallization of sample 2 is better than that of