极紫外同步辐射光表征离子束诱导的纳米波纹.docx

摘要

离子轰击固体表面诱导的纳米结构具有小周期（10~100 nm）、大面积、准周期的特点。

利用氩离子轰击在减反膜上制备出横向特征尺寸在 100 nm 附近、横向周期性与纵向连续

性逐步明显的准周期纳米波纹结构。为了增大表征面积，利用极紫外散射法表征了上述自

组织纳米波纹的形貌特征。结果显示，面内和锥角模式的极紫外散射法所获得的样品横向

和纵向形貌特征，均能够与原子力扫描显微镜所获得的样品形貌特征相对应，这初步说明

了此方法表征准周期纳米波纹结构基本形貌特征的可行性，为后续的定量分析提供基础。

同时，利用极紫外同步辐射光表征的自组织纳米结构面积达到了 mm

2

量级，将合肥光源计

transverse periodicity and longitudinal continuity were fabricated on antireflection

coatings by Argon-IB. To improve the characterization area, the morphological

characteristics of the self-organized nanoripples were characterized by using extreme

ultraviolet (EUV) scatterometry. The results show that in terms of samples, their

transverse and longitudinal morphological features obtained by the in-plane and conical

mode of the EUV scatterometry are in agreement with those obtained by atomic force

microscope. These results demonstrate that the proposed method is feasible to

characterize the basic morphological characteristics of quasi-periodic nanoripples and

can provide a basis for subsequent quantitative analysis. In addition, the characterization

area of self-organized nanoripple structures has reached an order of the mm

by EUV

至 10~100 nm，其中纳米波纹结构在调控材料的光学

［3，7-9］

、生物

［10-11］

了极大的潜力。目前，研究人员主要通过原子力显微镜（AFM）获取约 1 μm

内的自组织

纳米结构形貌，以精确统计其局部形貌特征，如表面粗糙度、傅里叶变换（FFT）谱图、

功率谱密度（PSD）等，用于分析形貌的有序程度和其他特征信息，但是 AFM 表征范围