半导体通讯之secs文档.pdf
版权申诉
188 浏览量
2022-07-02
09:02:40
上传
评论
收藏 625KB PDF 举报
SECS I/II & GEM
CIMComputer Integrated Manufacturing
SECSSEMI Equipment Communication Standard
SEMI Semiconductor Equipment and Materials
International ! " # $ [1]% &' ( ) * +
, - . / 0 1 2 3 4# 56 7 8 9 4: ; <= > ? @ A B
C D E F G D H I J K L M N O P Q R D H S T 4U V W
X &
SECS
SECS MessageStream Function
Y Z [ \ ICIntegrated Circuit HDLHardware Description Language
] ^ _ ` a b J c d e f g h i b J , - &IC j k h
l m n o %Q 4 p q r s %Q \ h 4< t u v w
x t &y 0 z { |} Y ~ p A h n < N T Y p 4 , -
4w p 8 9 <4* + F SEMI SECS
4 F u
1. W (Equipment Status)&
2. : ; (Equipment Control and Diagnostics)&
3. W (Material Status)
4. : ; (Material Control)&
5. O (Exception Handling)&
6. (Data Collection)&
7. Process Program Management, Recipe&
8. : ; p g (Control Program Transfer)&
9. ¡ ¢ £ ¤ (System Errors)&
10. ¥ ¦ § ¨ (Terminal Services)&
11. © ª § ¨ (Host File Services)&
12. z { « (Wafer Mapping)&
13. ¬ g (Data Set Transfers)&
14. ® § ¨ (Object Services)&
15. ¯ ° (Recipe Management)&
16. p q (Processing Management)&
17. ± ¡ ¢ : ; (Subsystem Control and Data)&
剩余18页未读，继续阅读
资源评论
海澜明月
- 粉丝: 23
- 资源: 3326
