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對外秘

Time-of-Flight Sensor

Calibration Guide

Revision 2.0

June 10, 2019

Important Notice

Samsung Electronics Co. Ltd. (“Samsung”) reserves the

right to make changes to the information in this publication

at any time without prior notice. All information provided is

for reference purpose only. Samsung assumes no

responsibility for possible errors or omissions, or for any

consequences resulting from the use of the information

contained herein.

This publication on its own does not convey any license,

either express or implied, relating to any Samsung and/or

third-party products, under the intellectual property rights of

Samsung and/or any third parties.

Samsung makes no warranty, representation, or guarantee

regarding the suitability of its products for any particular

purpose, nor does Samsung assume any liability arising out

of the application or use of any product or circuit and

specifically disclaims any and all liability, including without

limitation any consequential or incidental damages.

Customers are responsible for their own products and

applications. "Typical" parameters can and do vary in

different applications. All operating parameters, including

"Typicals" must be validated for each customer application

by the customer's technical experts.

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警告本文件仅向经韩国三星电子株式会社授权的人员提供，

其内容含有商业秘密保护相关法规规定并受其保护的三星电

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Samsung Electronics Co., Ltd.

San #24 Nongseo-Dong, Giheung-Gu

Yongin-City, Gyeonggi-Do, Korea 446-711

Home Page: http://www.samsungsemi.com

對外秘

Contents

1 OVERVIEW ...................................................................................................... 6

Systematic Errors ......................................................................................................................................... 6 1.1

1.1.1 Wiggling ................................................................................................................................................ 6

1.1.2 Fixed Phase Pattern Noise (FPPN) ...................................................................................................... 6

1.1.3 Temperature Drift.................................................................................................................................. 6

1.1.4 Lens ...................................................................................................................................................... 7

Overall Calibration Procedure ...................................................................................................................... 7 1.2

2 CALIBRATION ............................................................................................... 11

Temperature Drift ....................................................................................................................................... 11

2.1

2.1.1 Procedure ........................................................................................................................................... 11

2.1.2 Equipment ........................................................................................................................................... 12

Wiggling, Lens-FPPN ................................................................................................................................. 14 2.2

2.2.1 Procedure ........................................................................................................................................... 15

2.2.2 Equipment ........................................................................................................................................... 16

Lens-FPPN ................................................................................................................................................. 18 2.3

2.3.1 Procedure ........................................................................................................................................... 19

2.3.2 Equipment ........................................................................................................................................... 22

3 SOFTWARE ................................................................................................... 24

Overview .................................................................................................................................................... 24 3.1

Temperature Drift Tool ............................................................................................................................... 24 3.2

3.2.1 Usage ................................................................................................................................................. 25

3.2.2 Deliverables ........................................................................................................................................ 28

3.2.3 Temperature Drift Monitor Configuration file ...................................................................................... 29

3.2.4 Temperature Drift Monitor DLL API .................................................................................................... 29

3.2.5 Temperature Drift Monitor Output ....................................................................................................... 35

Calibration Library ...................................................................................................................................... 35 3.3

3.3.1 Deliverables ........................................................................................................................................ 35

3.3.2 API ...................................................................................................................................................... 36

3.3.3 Calibration Configuration file .............................................................................................................. 36

3.3.4 Calibration Result Output ................................................................................................................... 39

DEPS Tool ................................................................................................................................................. 39 3.4

REFERENCES .................................................................................................. 40

對外秘

List of Figures

Figure Title Page

Number Number

Figure 1.1 Systematic Error Sources ......................................................................................................................... 6

Figure 1.2 Overall Calibration Procedure .................................................................................................................. 7

Figure 1.3 M2M Calibration Procedure ...................................................................................................................... 8

Figure 1.4 Overall Compensation Procedure ............................................................................................................ 9

Figure 1.5 Example of Overall Compensation Procedure ....................................................................................... 10

Figure 2.1 Temperature Drift Calibration Procedure ............................................................................................... 12

Figure 2.2 Example of temperature drift compensation equipment using a plane chart. Adjustable height stage

mount for module (400~700mm) which is combined with TEC. Height will be fixed for a manufacturing

environment. ...................................................................................................................................................... 13

Figure 2.3 Temperature Calibration Board .............................................................................................................. 13

Figure 2.4 Comparison between a moving chart ((a) and (b)), and a virtual chart by time-delay ((c) and (d)) ....... 15

Figure 2.5 Wiggling Calibration Procedure .............................................................................................................. 16

Figure 2.6 Wiggling and Lens-FPPN Calibration Chart. Height adjustable stage mount for module (375 – 825 mm)

and an angle adjustable chart (20º – 40º). Height and angle will be fixed for a manufacturing environment. .. 17

Figure 2.7 The Wiggling Calibration Board. ............................................................................................................. 18

Figure 2.8 Lens-FPPN Calibration Procedure ......................................................................................................... 20

Figure 2.9 Lens Calibration Procedure. ................................................................................................................... 20

Figure 2.10 FPPN Calibration Procedure; each rotation. ........................................................................................ 21

Figure 2.11 FPPN Calibration Procedure; merge all rotations. ............................................................................... 22

Figure 2.12 Lens-FPPN Calibration Chart. Height adjustable stage mount for module (375 – 825 mm) and an

angle adjustable chart (20º – 40º). Height and angle will be fixed for a manufacturing environment. .............. 23

Figure 3.1 Released Softwares; 1) Temperature Drift Tool, 2) Calibration Library, 3) Validation Tool. .................. 24

Figure 3.2 Temperature Drift Calibration Block Diagram ......................................................................................... 25

Figure 3.3 Temperature Drift Monitor GUI ............................................................................................................... 25

Figure 3.4 Temperature Drift Monitor Options ......................................................................................................... 26

Figure 3.5 Set Path Dialog ....................................................................................................................................... 26

Figure 3.6 Temperature drift offset from reference depth caused by self-induced heating ..................................... 27

Figure 3.7 Display Depth Map ................................................................................................................................. 28

Figure 3.8 Display Information ................................................................................................................................. 28

Figure 3.9 Temperature Drift Monitor Configuration XML example ......................................................................... 29

Figure 3.10 Temperature Drift Monitor API Guide ................................................................................................... 32

Figure 3.11 Calibration Configuration XML example ............................................................................................... 37