Optik
127
(2016)
1171–1175
Contents
lists
available
at
ScienceDirect
Optik
jo
ur
nal
homepage:
www.elsevier.de/ijleo
Femtosecond
laser-induced
periodic
surface
structure
on
fused
silica
surface
Zhou
Fang
a,b
,
Yuan’an
Zhao
a,∗
,
Jianda
Shao
a
a
Key
Laboratory
of
Materials
for
High
Power
Laser,
Shanghai
Institute
of
Optics
and
Fine
Mechanics,
Chinese
Academy
of
Science,
Shanghai
201800,
China
b
University
of
the
Chinese
Academy
of
Sciences,
Beijing
100049,
China
a
r
t
i
c
l
e
i
n
f
o
Article
history:
Received
3
February
2015
Accepted
29
October
2015
Keywords:
Femtosecond
laser
damage
Laser-induced
periodic
surface
structure
Interference
Fused
silica
a
b
s
t
r
a
c
t
Single
and
10-pulse
laser-induced
surface
damage
behaviors
of
fused
silica
were
investigated
using
a
linearly
polarized
40-fs
Ti:
sapphire
laser
system
operating
at
a
central
wavelength
of
800
nm.
After
the
sample
was
subjected
to
single-shot
laser
irradiation,
it
displayed
a
typically
damaged
crater,
and
two
types
of
laser-induced
periodic
surface
structures
(LIPSS)
on
the
surface
of
the
damage
crater
were
found
under
10-pulse
laser
irradiation.
By
increasing
the
laser
fluence,
the
LIPSS
orientation
rotated
by
90
◦
,
and
the
period
changed
from
300
nm
to
700
nm.
Under
near-threshold
laser
irradiation,
an
intermittent
LIPSS,
whose
orientation
was
perpendicular
to
the
laser
beam
polarization
direction
and
average
spatial
period
was
around
300
nm,
was
found
on
the
damaged
area.
Another
type
of
LIPSS,
which
was
parallel
to
the
laser
beam
polarization
and
had
a
period
of
approximately
700
nm,
was
continuously
formed
at
the
bottom
of
the
ablation
crater
when
the
laser
fluence
exceeded
the
damage
threshold
of
material.
A
model
based
on
the
theory
of
interference
between
the
incident
laser
and
the
surface
scattered
wave
was
adopted
to
explain
the
formation
mechanism
of
the
LIPSS.
©
2015
Elsevier
GmbH.
All
rights
reserved.
1.
Introduction
With
the
development
of
femtosecond
(fs)
laser
system,
numer-
ous
practical
applications
have
been
developed
in
fields
that
involve
material
removal
with
submicron
precision,
such
as
micromachin-
ing,
electronics,
and
data
storage.
The
formation
of
laser-induced
periodic
surface
structures
(LIPSS)
has
gained
significant
attention
in
the
past
few
decades
[1–16]
because
of
its
precise
micromach-
ining
with
nanometric
resolution.
In
previous
publications,
two
different
types
of
LIPSS,
the
low
spatial
frequency
LIPSS
(LSFL)
[1,3–6,17]
and
the
high
spatial
frequency
LIPSS
(HSFL)
[1–6],
were
discovered
on
fused
silica
surface.
These
distinct
types
of
LIPSS
were
either
parallel
[1,3–5]
or
perpendicular
[1–5,17,18]
oriented
to
the
laser
beam
polarization
direction
with
a
linearly
polarized
fs
laser
irradiation
in
air
under
normal
incidence.
The
period
of
the
LSFL
is
close
to
or
somewhat
smaller
than
the
laser
wavelength,
whereas
HSFL
often
have
spatial
periods
that
are
significantly
smaller
than
the
laser
wavelength.
Höhm
et
al.
[1]
found
that
HSFL
will
transform
into
LSFL
with
the
increase
of
laser
fluence
∗
Corresponding
author.
E-mail
address:
yazhao@mail.siom.ac.cn
(Y.
Zhao).
on
quartz
surface
under
10-pulse
fs
laser
irradiation,
but
the
critical
fluence
was
significantly
higher
than
the
laser-induced
damage
threshold
(LIDT).
With
fs
laser
pulse
train
irradiation,
Jiang
et
al.
[6]
found
that
LSFL
will
transform
into
HSFL
with
different
laser
delay
time
on
fused
silica
surface.
The
formation
mechanisms
of
LIPSS
were
still
controversially
discussed
in
the
literature,
and
different
models,
such
as
interference
[1,19–21],
self-organization
[8,9],
second
harmonic
generation
(SHG)
[22,23],
excitation
of
sur-
face
plasmon
polaritons
[24,25],
and
Coulomb
explosion
[26],
have
been
proposed.
Therefore,
the
major
question
was
open
in
the
area
of
LIPSS,
which
required
more
experimental
and
theoretical
studies.
In
this
study,
the
surface
damage
behavior
of
fused
silica
under
single
and
multi-pulse
fs
laser
irradiation
was
explored,
and
an
interesting
LIPSS
phenomenon
generated
by
10-pulse
fs
laser
irra-
diation
was
found.
With
the
increase
of
laser
fluence,
the
average
period
of
the
LIPSS
was
changed
from
300
nm
to
700
nm,
and
the
orientation
of
the
LIPSS
was
changed
from
a
perpendicular
orienta-
tion
to
a
parallel
orientation
compared
with
the
laser
polarization
direction.
In
other
words,
HSFL
will
transform
into
LSFL
with
the
increase
of
laser
fluence
under
10-pulse
laser
irradiation,
and
the
transition
fluence
is
close
to
the
LIDT
of
fused
silica.
More
signifi-
cantly,
the
LIPSS
evolution
on
fused
silica
surface
results
from
an
interference
process.
http://dx.doi.org/10.1016/j.ijleo.2015.10.210
0030-4026/©
2015
Elsevier
GmbH.
All
rights
reserved.
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