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Accepted Manuscript

Tunable-Sensitivity Flexible Pressure Sensor based on Graphene Transparent

Electrode

Shi Luo, Jun Yang, Xuefen Song, Xi Zhou, Leyong Yu, Tai Sun, Chongsheng

Yu, Deping Huang, Chunlei Du, Dapeng Wei

PII: S0038-1101(17)30883-3

DOI: https://doi.org/10.1016/j.sse.2018.04.003

Reference: SSE 7419

To appear in:

Solid-State Electronics

Received Date: 24 November 2017

Revised Date: 16 March 2018

Accepted Date: 15 April 2018

Please cite this article as: Luo, S., Yang, J., Song, X., Zhou, X., Yu, L., Sun, T., Yu, C., Huang, D., Du, C., Wei,

D., Tunable-Sensitivity Flexible Pressure Sensor based on Graphene Transparent Electrode, Solid-State

Electronics (2018), doi: https://doi.org/10.1016/j.sse.2018.04.003

This is a PDF file of an unedited manuscript that has been accepted for publication. As a service to our customers

we are providing this early version of the manuscript. The manuscript will undergo copyediting, typesetting, and

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errors may be discovered which could affect the content, and all legal disclaimers that apply to the journal pertain.

Tunable-Sensitivity Flexible Pressure Sensor based on Graphene

Transparent Electrode

Shi Luo,

1,2

Jun Yang,

* Xuefen Song,

Xi Zhou,

1,2

Leyong Yu,

Tai Sun,

Chongsheng Yu,

Deping

Huang,

Chunlei Du

and Dapeng Wei

1,2

Chongqing Key Laboratory of Multi-scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Tech-

nology, Chinese Academy of Sciences, Chongqing 400714, PR China.

University of Chinese Academy of Sciences, Beijing, 100049, PR China

E-mail: dpwei@cigit.ac.cn;

Abstract

Tunable-sensitivity and flexibility are considered as two crucial characteristics for future pressure sensors or electronic skins.

By the theoretical calculation model, we simulated the relationship curve between the sensitivity and PDMS pyramids with

different spacings, and found that the spacing of pyramids is a main factor to affect the sensitivity of the capacitance pressure

sensor. Furthermore, we fabricated the capacitance pressure sensors using graphene electrodes and the PDMS pyramid die-

lectric layers with different spacings. The measurement data were consistent with the simulation results that the sensitivity

increases with the spacing of pyramids. In addition, graphene electrode exhibits prefect flexibility and reliability, while the

ITO electrode would be destroyed rapidly after bending. These graphene pressure sensors

exhibit the potential in the ap-

plication in the wearable products for monitoring breath, pulse, and other

physiological signals.

Keywords: graphene electrodes, pressure sensor, tunable sensitivity, flexibility.

1. Introduction

Recent years, flexible pressure sensor has attracted an

amount of interest, owing to increasing demand over the

last decades. Flexible pressure sensors could work as hu-

man’s skin, and have potential in a lot of application fields,

including robotic arms,[1-4] flexible electronic devices,[5-9]

wearable devices,[10-14] health monitoring[15-18], hu-

man-machine interaction[19-21]. These pressure sensors

have different sensing mechanics, including capacitive [11,

20, 22], resistive[21, 23, 24]，piezoelectric[25, 26] and so

on. Among them, capacitive sensors have unique ad-

vantages in terms of stability, low power consumption and

fast response. At present, scientists have been able to im-

prove the sensitivity mainly by microstructure of electrode

and dielectric layer.[4,27] Yong taek Hong reported that

silver nanowires was covered on PDMS substrate with rip-

ple structures as an electrode[27], and these pressure sen-

sors achieved a high sensitivity (3.8KPa

-1

). Later, they im-

proved the sensitivity to 9.9 KPa

-1

by the spacing structure

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