Large-rangedisplacementmeasurementusingsinusoidalphase-modulatinglaserdiodeinterferometer资源-CSDN文库

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Large-range displacement measurement using sinusoidal

phase-modulating laser diode interferometer

Ming Zhang (张鸣)

1,2,

*, Chang Ni (倪畅)

1,2

, Yu Zhu (朱煜)

1,2

, Leijie Wang (王磊杰)

1,2

Chuxiong Hu (胡楚雄)

1,2

, and Jinchun Hu (胡金春)

1,2

State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University,

Beijing 100084, China

Beijing Laboratory of Precision/Ultra-Precision Manufacture Equipment and Control, Tsinghua University,

Beijing 100084, China

*Corresponding author: zm01@mails.tsinghua.edu.cn

Received April 23, 2017; accepted June 16, 2017; posted online July 11, 2017

A signal processing method of realizing a large-range displacement measurement in a sinusoidal phase-

modulating laser diode interferometer is proposed. The method of obtaining the dynamic value of the effective

sinusoidal phase-modulating depth is detailed, and the residual amplitude modulation is also taken into account.

Numerical simulations and experiments are carried out to compare this method with the traditional one.

We prove that, with this method, the sinusoidal phase-modulating laser diode interferometer can realize a

centimeter-level displacement measurement range with high precision, which is much better than the traditional

method.

OCIS codes: 120.3180, 070.6020, 350.2460.

doi: 10.3788/COL201715.101201.

The sinusoidal phase-modulating laser diode (SPM-LD)

interferometer has been used for vibration sensing and

displacement measurement because of unique features

such as simplicity and good expansibility

[1–17]

. However,

the measurement range of this interferometer is limited

to a few micrometers because an important parameter,

the effective SPM depth, is considered to be a constant

in conventional signal processing

[1–3]

. The effective SPM

depth actually is linear to the length difference between

the reference arm and the measurement arm in the

SPM-LD interferometer

[4,5]

. As a result, the traditional

method would result in great errors in the large-range

displacement measurement. Therefore, to realize the

large-range displacement measurement accurately, special

methods are required to get the dynamic value of the

effective SPM depth. Some patents set the effective

SPM depth as a small number and apply the equivalent

infinitesimal replacement method to estimate its dynamic

value

[6–9]

. This is very useful , but because of the small num-

ber set as the effective SPM depth, the amplitudes of the

harmonics extracted from the interference signal could be

very small, which would give a low signal-to-noise ratio

(SNR) and limit the entire measurement accuracy. In

addition, the sinusoidal modulation of the frequency in-

volves a residual amplitude modulation (RAM) to the la-

ser, which would also cause errors and need to be taken

into account

[10,11]

In this Letter, a novel sig nal proce ssing method is pro-

posed to improve the performance of a large-range dis-

placement measurement in the SPM-LD interferometer

by obtaining the dynamic value of the effective SPM

depth. Numerical simulations and experiments are carried

out to compare the novel method with the traditional one.

The simulation and experimental results prove that the

displacement measurement range of the SPM-LD interfer-

ometer can be enlarged to the centimeter level with high

precision.

Figure

1 shows the structure of the SPM-LD interferom-

eter for the large-range displacement measurement.

The light from the laser, whose frequency is modulated

by the SPM signal from the signal generator, is emitted by

the collimator after it goes through the isolator. The fre-

quency modulation of the laser leads to a phase modula-

tion term in the interference signal

[4,5]

. The laser is split

into two parts by the beam splitter (BS). One part, which

is reflected by the reference mirror, serves as a reference

wave. The other part, which is reflected by the object

mirror, serves as a measurement wave. The reference wave

and measurement wave are recombined by the BS and

interfere with each other. And, the interference signal is

detected by the photoelectric detector (PD) and acquired

Fig. 1. Structure of the SPM-LD interferometer for the large-

range displacement measurement.

COL 15(10), 101201(2017) CHINESE OPTICS LETTERS October 10, 2017

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