Olav Solgaard
Stanford University
E.L. Ginzton Laboratory
Stanford, CA 94305
Series Editors
Stephen Senturia Roger T. Howe
Massachusetts Institute of Technology Stanford University
Cambridge, MA 02446 Stanford, CA 94035
Antonio J. Ricco
NASA Ames Research Center
Moffett Field, CA 94035
MEMS Reference Shelf ISSN 1936-4407
ISBN 978-0-387-29022-5
Library of Congress Control Number: 2008937947
© 2009 Springer Science+Business Media, LLC
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