SECS GEM标准白皮书

Introduction to the SEMI

Standards: SECS/GEM

July 6, 2016

www.cimetrix.com

Introduction to the SEMI Standards: SECS/GEM Page 2 of 14

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Introduction to the SEMI Standards: SECS/GEM Page 3 of 14

Table of Contents

1 Overview ................................................................................... 4

3 GEM Host and Equipment Communication ......................................... 5

4 SECS-II Message Communication .................................................... 6

5 Feature Summary ........................................................................ 7