Inertial MEMS
Principles and Practice
A practical and systematic overview of the design, fabrication, and testing of
MEMS-based inertial sensors, this comprehensive and rigorous guide shows you
how to analyze and transform application requirements into practical designs,
and helps you to avoid potential pitfalls and to cut design time.
With this book you’ll soon be up to speed on the relevant basics, includ-
ing MEMS technologies, packaging, kinematics and mechanics, and transducers.
You’ll also get a thorough evaluation of different approaches and architectures
for design and an overview of key aspects of testing and calibration.
Unique insights into the practical difficulties of making sensors for real-world
applications make this up-to-date description of the state of the art in inertial
MEMS an ideal resource for professional engineers in industry, managers, and
application engineers, as well as for students looking for a complete introduction
to the area.
Volker Kempe has more than 40 years of experience in research and devel-
opment in both academia and industry. He led the microelectronics engineering
department at Austria Mikro Systems for over 10 years. In 2003 he co-founded,
and became Vice President of, SensorDynamics AG, and his current interests
focus on the functionality, technology, and application of inertial MEMS.
