SILVACO International
4701 Patrick Henry Drive, Bldg. 1
Santa Clara, CA 94054 Edition Two
Telephone: (408) 567-1000 January 1999
FAX: (408) 496-6080
E-Mail: support@silvaco.com
Internet: http://www.SILVACO.com
TCAD
Tutorial and Examples
Volume I
TCAD
Tutorial and Examples Manual
Volume I
Copyright 1999
SILVACO International
4701 Patrick Henry Drive, Bldg. 1
Santa Clara, CA 95054
Phone: (408) 567-1000
FAX: (408) 496-6080
E-Mail: support@silvaco.com
Internet: http://www.SILVACO.com
Notice
SILVACO International iii
The information contained in this document is subject to change without notice.
SILVACO International MAKES NO WARRANTY OF ANY KIND WITH REGARD TO THIS
MATERIAL, INCLUDING, BUT NOT LIMITED TO, THE IMPLIED WARRANTY OF FIT-
NESS FOR A PARTICULAR PURPOSE.
SILVACO International Inc. shall not be liable for errors contained herein or for incidental or con-
sequential damages in connection with the furnishing, performance, or use of this material.
This document contains proprietary information, which is protected by copyright. All rights are re-
served. No part of this document may be photocopied, reproduced, or translated into another lan-
guage without the prior written consent of SILVACO International.
S
IMULATION STANDARD, TCADDRIVENCAD, VIRTUAL WAFER FAB, ANALOG ALLIANCE, LEGACY,
ATHENA, ATLAS, FAST ATLAS, ODIN, VYPER, CRUSADE, RESILIENCE, DISCOVERY, CE-
LEBRITY, PRODUCTION TOOLS, AUTOMATION TOOLS, INTERACTIVE TOOLS, TONYPLOT, DECKBUILD,
D
EVEDIT, INTERPRETER, ATHENA INTERPRETER, ATLAS INTERPRETER, CIRCUIT OPTIMIZER, MASK-
V
IEWS, PSTATS, SSUPREM3, SSUPREM4, ELITE, OPTOLITH, FLASH, SILICIDES, SPDB, CMP, MC DE-
POSIT, MC IMPLANT, PROCESS ADAPTIVE MESHING, S-PISCES, BLAZE, DEVICE 3D, INTERCONNECT3D,
B
LAZE3D, GIGA3D, MIZEDMODE3D, TFT, LUMINOUS, GIGA, MIZEDMODE, ESD, LASER, FASTBLAZE,
F
ASTMIXEDMODE, FASTGIGA, FASTNOISE, MOCASIM, UTMOST, UTOMST II, UTMOST III, UT-
MOST IV, PROMOST, SPAYN, S
MARTSPICE, MIXSIM, TWISTER, FASTSPICE, SMARTLIB, SDDL, EX-
ACT, CLEVER, STELLAR, HIPEX, LISA, S
CHOLAR, SIREN, ESCORT, STARLET, EXPERT, SAVAGE,
S
COUT, GUARDIAN, and ENVOY are trademarks of SILVACO INTERNATIONAL.
All other trademarks mentioned in this manual are the property of their respective owners.
©1990, 1991, 1992, 1993, 1994, 1995, 1996, 1997, 1998, 1999 by SILVACO International, Inc.
Reader Comment Sheet
iv SILVACO International
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Introduction
SILVACO International v
Intended Audience
The information in this manual is based on the following assumptions:
• The reader is familiar with the basic terminology of semiconductor processing and semi-
conductor device operation,
and
• The reader understands the basic operations of the computer hardware and operation
systems being used.
Introduction
This manual is intended as an additional guide to the use of Silvaco’s process and device simulators.
It contains descriptions of all the standard examples that demonstrate the use of SSUPREM3,
ATHENA, ATLAS, and the VWF I
NTERACTIVE TOOLS manuals. Users should consult the relevant
“User’s Manual” for a full description of the models and syntax of each program.
Included on your distribution media are more than five hundred (500) Standard Examples that
demonstrate the way that the simulators are used to model many different technologies. The exam-
ples are instructional and it is strongly recommended that new users apply these examples as a
starting point for creating their own simulations. One of the first things you should learn is how to
access, load, and run these examples.
Accessing the Examples
The examples are accessed from the menu system in DECKBUILD. To select and load an example:
1. Start D
ECKBUILD as described in the VWF INTERACTIVE TOOLS MANUAL.
2. Pull down the MainControl menu using the right hand mouse button. There are op-
tions on this menu for MainControl, Optimizer, Examples, Help, etc.
3. Select Examples. An index will appear in a DeckBuild: Examples window (see be-
low). The examples are divided by technology or technology group. The most common technolo-
gies are clear (e.g., MOS, BJT) while others are grouped with similar devices (e.g., IGBT and
LDMOS are under POWER, and solar cell and photodiode are under OPTOELECTRONICS).
