optical lithography introduction

What is optical lithography? The optical system Production process Future and limits of optical lithography References

Optical lithography

Robin Nagel

TUM

12. Januar 2009

Robin Nagel (TUM) Optical lithography 12. Januar 2009 1 / 22

What is optical lithography? The optical system Production process Future and limits of optical lithography References

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What is optical lithography?

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References

Robin Nagel (TUM) Optical lithography 12. Januar 2009 2 / 22

What is optical lithography? The optical system Production process Future and limits of optical lithography References

What is optical lithography?

Lithography (from the Greek - lithos:

”

optical lithography is a process used to selectively remove parts

of a thin film.

Until now, it is the only way for industrial mass production of

computer chips

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What is optical lithography? The optical system Production process Future and limits of optical lithography References

The optical system

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What is optical lithography? The optical system Production process Future and limits of optical lithography References

Mask making process

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