Monte Carlo simulations of a microwave plasma (frequency 2.45 GHz, pressure 2–15 kPa) in hydrogen are reported. The simulation follows the chaotic motion of a number of electrons and ions under the influence of outer (microwave) and inner (other charge carriers) electric fields. The charge carriers collide with the neutral gas particles either in an elastic or inelastic manner. In such a simulation only basic physical laws have to be applied.
