RGH25F RGF 光栅读数头及细分卡
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2011-11-10
14:04:38
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Data sheet
L-9517-9113-01-A
RGH25F high resolution encoder system
• Non-contact open
optical system
• Resolutions of 10 nm
and 20 nm
• Better than 0.1 µm
cyclic error
• Self tuning adaptive
electronics give
reliability and high
accuracy
• Uses low profile
RGS20-S self-adhesive
scale
• Low mass
• Integral set-up and
diagnostic LEDs for
quick set-up
Renishaw’s RGH25F offers
all the benefits of the market
leading RG2 non-contact
linear encoder systems;
patented filtering optical
scheme, high contamination
tolerance and high speed.
The RGH25F has been designed for use
with Renishaw’s RGS20-S gold-plated
scale in precision applications requiring
fine resolutions, high accuracy, compact
size and low mass.
The readhead is enclosed in an RFI screened
housing and uses proven solid state
components to give outstanding reliability.
The RGF interfaces can be mounted
remotely to interpolate the signals produced
by the readhead.
The interfaces incorporate automatic gain
control and unique self-tuning adaptive
electronics which, combined with the
filtering optics, ensure excellent signal
integrity, and give a cyclic error of better
than 0.1 µm.
Common applications include optical fibre
alignment, semiconductor manufacturing,
inspection, precision stages and other
systems requiring high resolution where
space is at a premium.
Readhead RGH25F - common readhead
Interface RGF1000 - 20 nm resolution
units RGF2000 - 10 nm resolution
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