### Synopsys通过计算数值设计变焦镜头方法.pdf

Why a zoom lens? Everyone knows the answer! To change focal length and field of view But let's think out of the box Zooming elements are good for other things too BOX BoX Problems? Zoom lens Solutions Sometimes a zoom lens is the solution Heres an example of a novel use of a zooming element. This is a Schwarzschild objective. Aberration correction varies with object distance. A zooming element compensates 10 ZOOM POSITION 2 Here' s another interesting application this microlithography lens is telecentric at object and image. How can one adjust the magnification Just moving the object and image doesn ' t change the image size A weak element operating at 1: 1 conjugates alters the imaga h night without changing the focus position, to first order 23 33 113 (15 19 (25 I have a patent on T an this concept 0.50000 WAVES Sa OPTICAL PATH DIFF. 1.00E-06 REL FIELD 075000 1.00000 Merit=0.0840787 SYNOPSYS 21-DEC1815:13:37 How does this work? THIS LENS WORKS AT 1: 1 CONJUGATE ONGITUDINAL MAGNIFICATION IS THE SQUARE OF THE LATERAL So the longitudinal magnIfication OBJECT is also 1.0 IMAGE 王 MOVE THE OBJECT BY X AND THE IMAGE MOVES BY X So moving the lens by x does not move the image To first order But the magnification changes 皿M删ⅢⅢⅢ US009939734B2 (12)United States Patent (10) Patent No. US 9,939, 734 B2 Dilworth 45)Date of Patent: Apr.10,2018 (54) PHOTOLITHOGRAPHY APPARATUS (56) References Cited COMPRISING PROJECTION SYSTEM FOR CONTROL OF IMAGE SIZE U.S. PATENT DOCUMENTS (71) Applicant: Liteq B V, Nuenen (NL) 5. 117. A+ 5/1992 Shiraish Go3F770241 35552 2)Inventor: Donald Charles Dilworth, Nuenen 5610754 3/1997 Gheen ef al (NL) (Continued) (73) Assignee: KuLICKE SOFFA LITEQ B.,Ae FOREIGN PATENT DOCUMENTS Eindhoven (NL) 1416019 5/2003 ) Notice: Subject to any disclaimer, the term of thisCN 1476629 2/2004 patent is extended or adjusted under 35 (Continued) U.S.C. 154(b)by 0 OTHER PUBLICATIONS (21)Appl.No:15/305,1 Chinese offce Action, issued in Chinese Application No (22)PCT Filed: Apr 22, 2015 201580019559L, dated Now.17,2017 (86 PCT No: PCT/EP2015/058641 Primary Examiner- Hung Henry Nguyen §37l(c1), (2)Date:oct.19,2016 (74)Attorney, Agent, or Firm-Prcti Flaherty Beliveau Pachios LLP (87) PCT Pub.NoWo2015/62147 PCT Pub. Date: Oct. 29, 2015 (S7) ABSTRACT (65) Prior Publication Data The present disclosure concerns a photolithography appa ratus(100)and method for controlling relative image size US20170123329 Al May4,2017 (S1S0) of a projected substrate pattern(W). A projection A1 Here's a novel use of the zoom feature: correcting for a range of object distances. If you only correct at infinity the image is worse up close There are no zooming elements in this zoom lens Only the object and image locations zoom Tan The zoom feature is 0.05000MM used only as a way to correct two conjugates TRANSVERSE ABER, 1.00E-06 REL FIELD 0.75000 1.00000 Merit = 1.09306 SYNOPSYS 21DEc1815:25:34 ZOOM LENS PROFILE of course, most ZooM 2 T zoom lenses are intended for a ZOoM 3 large change in magnIfication Z00M4 This is a typica refractive zoom lens ZooM SCALE 0.4317x 10 ID SAMPLE ZOOM LENS 33156 1DEc1810:1846

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