PolyMUMPs design handbook

伯克利mems课程参考用书 Table of Contents Chapter 1: Three-Layer Polysilicon Surface Micromachining Process 1.1 Introduction ...................................................................................................................................................................... 1 1.2 Process Overview............................................................................................................................................................. 2 Chapter 2: PolyMUMPs Design Guidelines and Rules 2.1 Introduction .................................................................................................................................................................... 11 2.2 Design Rules ................................................................................................................................................................... 12 2.3 Beyond the Design Rules................................................................................................................................................ 31 2.4 Film Parameters ............................................................................................................................................................. 36 2.5 EZ-PolyMUMPs Design Rules.......................................................................................................................................... 38 2.6 Layout Requirements ..................................................................................................................................................... 38 2.7 Die Reservation and Layout Submission........................................................................................................................ 39 2.8 Custom Dicing, Releasing and Critical Point Drying....................................................................................................... 39 2.9 Other Reference Material ............................................................................................................................................... 40